Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures
Publication
, Conference
Gall, K; Dunn, ML; Hulse, M; Finch, D; George, SM
Published in: IEEE International Reliability Physics Symposium Proceedings
January 1, 2003
In the present study we examine the effect of different thermal hold temperatures on creep and stress relaxation during the first thermal cycle and the effect of maximum cycling temperature on thermal ratcheting. We also explore the use of Atomic Layer Deposition (ALD) Al2O3 nanocoatings for the potential suppression of creep and thermal ratcheting. High-resolution Scanning Electron Microscopy (SEM) is employed to examine surface microstructural changes induced by thermal holding or cycling with and without ALD nanocoatings.
Duke Scholars
Published In
IEEE International Reliability Physics Symposium Proceedings
DOI
ISSN
1541-7026
ISBN
0780376498
Publication Date
January 1, 2003
Volume
2003-January
Start / End Page
463 / 472
Citation
APA
Chicago
ICMJE
MLA
NLM
Gall, K., Dunn, M. L., Hulse, M., Finch, D., & George, S. M. (2003). Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. In IEEE International Reliability Physics Symposium Proceedings (Vol. 2003-January, pp. 463–472). https://doi.org/10.1109/RELPHY.2003.1197793
Gall, K., M. L. Dunn, M. Hulse, D. Finch, and S. M. George. “Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures.” In IEEE International Reliability Physics Symposium Proceedings, 2003-January:463–72, 2003. https://doi.org/10.1109/RELPHY.2003.1197793.
Gall K, Dunn ML, Hulse M, Finch D, George SM. Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. In: IEEE International Reliability Physics Symposium Proceedings. 2003. p. 463–72.
Gall, K., et al. “Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures.” IEEE International Reliability Physics Symposium Proceedings, vol. 2003-January, 2003, pp. 463–72. Scopus, doi:10.1109/RELPHY.2003.1197793.
Gall K, Dunn ML, Hulse M, Finch D, George SM. Effect of Al2 O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. IEEE International Reliability Physics Symposium Proceedings. 2003. p. 463–472.
Published In
IEEE International Reliability Physics Symposium Proceedings
DOI
ISSN
1541-7026
ISBN
0780376498
Publication Date
January 1, 2003
Volume
2003-January
Start / End Page
463 / 472