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Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures

Publication ,  Conference
Gall, K; Dunn, ML; Hulse, M; Finch, D; George, SM
Published in: IEEE International Reliability Physics Symposium Proceedings
January 1, 2003
Published version (DOI)

In the present study we examine the effect of different thermal hold temperatures on creep and stress relaxation during the first thermal cycle and the effect of maximum cycling temperature on thermal ratcheting. We also explore the use of Atomic Layer Deposition (ALD) Al2O3 nanocoatings for the potential suppression of creep and thermal ratcheting. High-resolution Scanning Electron Microscopy (SEM) is employed to examine surface microstructural changes induced by thermal holding or cycling with and without ALD nanocoatings.

Duke Scholars

Ken Gall
Author Ken Gall Thomas Lord Department of Mechanical Engineering and Materia ...

Published In

IEEE International Reliability Physics Symposium Proceedings

DOI

10.1109/RELPHY.2003.1197793

ISSN

1541-7026

Publication Date

January 1, 2003

Volume

2003-January

Start / End Page

463 / 472
 

Citation

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ICMJE
MLA
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Gall, K., Dunn, M. L., Hulse, M., Finch, D., & George, S. M. (2003). Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. In IEEE International Reliability Physics Symposium Proceedings (Vol. 2003-January, pp. 463–472). https://doi.org/10.1109/RELPHY.2003.1197793
Gall, K., M. L. Dunn, M. Hulse, D. Finch, and S. M. George. “Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures.” In IEEE International Reliability Physics Symposium Proceedings, 2003-January:463–72, 2003. https://doi.org/10.1109/RELPHY.2003.1197793.
Gall K, Dunn ML, Hulse M, Finch D, George SM. Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. In: IEEE International Reliability Physics Symposium Proceedings. 2003. p. 463–72.
Gall, K., et al. “Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures.” IEEE International Reliability Physics Symposium Proceedings, vol. 2003-January, 2003, pp. 463–72. Scopus, doi:10.1109/RELPHY.2003.1197793.
Gall K, Dunn ML, Hulse M, Finch D, George SM. Effect of Al2O3 ALD nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures. IEEE International Reliability Physics Symposium Proceedings. 2003. p. 463–472.

Published In

IEEE International Reliability Physics Symposium Proceedings

DOI

10.1109/RELPHY.2003.1197793

ISSN

1541-7026

Publication Date

January 1, 2003

Volume

2003-January

Start / End Page

463 / 472