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A water-immersible 2-axis scanning mirror microsystem for ultrasound andha photoacoustic microscopic imaging applications.

Publication ,  Journal Article
Huang, C-H; Yao, J; Wang, LV; Zou, J
Published in: Microsystem technologies : sensors, actuators, systems integration
January 2013

Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging, whereas the liquid environment required for acoustic propagation limits the usage of traditional microelectromechanical systems (MEMS) scanning mirrors. Here, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. To achieve reliable underwater scanning, flexible polymer torsion hinges fabricated by laser micromachining were used to support the reflective silicon mirror plate. Two efficient electromagnetic microactuators consisting of compact RF choke inductors and high-strength neodymium magnet disc were constructed to drive the silicon mirror plate around a fast axis and a slow axis. The performance of this water-immersible scanning mirror microsystem in both air and water were tested using the laser tracing method. For the fast axis, the resonance frequency reached 224 Hz in air and 164 Hz in water, respectively. The scanning angles in both air and water under ±16 V DC driving were ±12°. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±13.6° and ±10°. For the slow axis, the resonance frequency reached 55 Hz in air and 38 Hz in water, respectively. The scanning angles in both air and water under ±10 V DC driving were ±6.5°. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±8.5° and ±6°. The feasibility of using such a water-immersible scanning mirror microsystem for scanning ultrasound microscopic imaging has been demonstrated with a 25-MHz ultrasound pulse/echo system and a target consisting of three optical fibers.

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Published In

Microsystem technologies : sensors, actuators, systems integration

DOI

EISSN

1432-1858

ISSN

0946-7076

Publication Date

January 2013

Volume

19

Issue

4

Start / End Page

577 / 582

Related Subject Headings

  • Nanoscience & Nanotechnology
  • Mechanical Engineering & Transports
  • 4009 Electronics, sensors and digital hardware
  • 1007 Nanotechnology
  • 1005 Communications Technologies
 

Citation

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ICMJE
MLA
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Huang, C.-H., Yao, J., Wang, L. V., & Zou, J. (2013). A water-immersible 2-axis scanning mirror microsystem for ultrasound andha photoacoustic microscopic imaging applications. Microsystem Technologies : Sensors, Actuators, Systems Integration, 19(4), 577–582. https://doi.org/10.1007/s00542-012-1660-4
Huang, Chih-Hsien, Junjie Yao, Lihong V. Wang, and Jun Zou. “A water-immersible 2-axis scanning mirror microsystem for ultrasound andha photoacoustic microscopic imaging applications.Microsystem Technologies : Sensors, Actuators, Systems Integration 19, no. 4 (January 2013): 577–82. https://doi.org/10.1007/s00542-012-1660-4.
Huang C-H, Yao J, Wang LV, Zou J. A water-immersible 2-axis scanning mirror microsystem for ultrasound andha photoacoustic microscopic imaging applications. Microsystem technologies : sensors, actuators, systems integration. 2013 Jan;19(4):577–82.
Huang, Chih-Hsien, et al. “A water-immersible 2-axis scanning mirror microsystem for ultrasound andha photoacoustic microscopic imaging applications.Microsystem Technologies : Sensors, Actuators, Systems Integration, vol. 19, no. 4, Jan. 2013, pp. 577–82. Epmc, doi:10.1007/s00542-012-1660-4.
Huang C-H, Yao J, Wang LV, Zou J. A water-immersible 2-axis scanning mirror microsystem for ultrasound andha photoacoustic microscopic imaging applications. Microsystem technologies : sensors, actuators, systems integration. 2013 Jan;19(4):577–582.
Journal cover image

Published In

Microsystem technologies : sensors, actuators, systems integration

DOI

EISSN

1432-1858

ISSN

0946-7076

Publication Date

January 2013

Volume

19

Issue

4

Start / End Page

577 / 582

Related Subject Headings

  • Nanoscience & Nanotechnology
  • Mechanical Engineering & Transports
  • 4009 Electronics, sensors and digital hardware
  • 1007 Nanotechnology
  • 1005 Communications Technologies