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On the nature of point defects and the effect of oxidation on substitutional dopant diffusion in silicon

Publication ,  Journal Article
Tan, TY; Gosele, U; Morehead, FF
Published in: Appl. Phys. A, Solids Surf. (West Germany)
1983

An extensive analysis of the substitutional dopant diffusion phenomena in silicon during oxidation is presented. The analysis covers qualitative as well as quantitative aspects of the oxidation-enhanced and -retarded diffusion (OED and ORD) phenomena, and examines three different possible assumptions that can be made on the nature of the silicon thermal equilibrium point defect species: silicon self-interstitials (I) only, vacancies (V) only, coexistence of I and V. The only consistent way to interpret all properly documented OED/ORD data is to assume that I and V coexist under oxidation as well as under thermal equilibrium conditions at high temperatures

Duke Scholars

Published In

Appl. Phys. A, Solids Surf. (West Germany)

Publication Date

1983

Volume

A31

Issue

2

Start / End Page

97 / 108
 

Citation

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Tan, T. Y., Gosele, U., & Morehead, F. F. (1983). On the nature of point defects and the effect of oxidation on substitutional dopant diffusion in silicon. Appl. Phys. A, Solids Surf. (West Germany), A31(2), 97–108.
Tan, T. Y., U. Gosele, and F. F. Morehead. “On the nature of point defects and the effect of oxidation on substitutional dopant diffusion in silicon.” Appl. Phys. A, Solids Surf. (West Germany) A31, no. 2 (1983): 97–108.
Tan TY, Gosele U, Morehead FF. On the nature of point defects and the effect of oxidation on substitutional dopant diffusion in silicon. Appl Phys A, Solids Surf (West Germany). 1983;A31(2):97–108.
Tan, T. Y., et al. “On the nature of point defects and the effect of oxidation on substitutional dopant diffusion in silicon.” Appl. Phys. A, Solids Surf. (West Germany), vol. A31, no. 2, 1983, pp. 97–108.
Tan TY, Gosele U, Morehead FF. On the nature of point defects and the effect of oxidation on substitutional dopant diffusion in silicon. Appl Phys A, Solids Surf (West Germany). 1983;A31(2):97–108.

Published In

Appl. Phys. A, Solids Surf. (West Germany)

Publication Date

1983

Volume

A31

Issue

2

Start / End Page

97 / 108