Enhancement of gold solubility in silicon wafers
Publication
, Journal Article
Li, J; Yang, W-S; Tan, TY
Published in: J. Appl. Phys. (USA)
1992
Edge-defined film-fed grown silicon wafers with a thin Au film deposited on one side were annealed at 950°C for various times. Spreading resistance probe measurements showed that at the wafer free surface the Au concentration was higher than the Au solubility in silicon found at the Au source side. Scanning electron microscopy, transmission electron microscopy, and energy-dispersive spectroscopy investigations revealed Au particles of nanometer size at the wafer free surface. The enhancement of the Au solubility at the wafer free surface is attributed to the existence of these small Au particles
Duke Scholars
Published In
J. Appl. Phys. (USA)
DOI
Publication Date
1992
Volume
71
Issue
1
Start / End Page
527 / 529
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 49 Mathematical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences
- 01 Mathematical Sciences
Citation
APA
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ICMJE
MLA
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Li, J., Yang, W.-S., & Tan, T. Y. (1992). Enhancement of gold solubility in silicon wafers. J. Appl. Phys. (USA), 71(1), 527–529. https://doi.org/10.1063/1.350693
Li, Jianxing, Woun-Suck Yang, and T. Y. Tan. “Enhancement of gold solubility in silicon wafers.” J. Appl. Phys. (USA) 71, no. 1 (1992): 527–29. https://doi.org/10.1063/1.350693.
Li J, Yang W-S, Tan TY. Enhancement of gold solubility in silicon wafers. J Appl Phys (USA). 1992;71(1):527–9.
Li, Jianxing, et al. “Enhancement of gold solubility in silicon wafers.” J. Appl. Phys. (USA), vol. 71, no. 1, 1992, pp. 527–29. Manual, doi:10.1063/1.350693.
Li J, Yang W-S, Tan TY. Enhancement of gold solubility in silicon wafers. J Appl Phys (USA). 1992;71(1):527–529.
Published In
J. Appl. Phys. (USA)
DOI
Publication Date
1992
Volume
71
Issue
1
Start / End Page
527 / 529
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 49 Mathematical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences
- 01 Mathematical Sciences