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Electrostatic micromachine scanning mirror for optical coherence tomography.

Publication ,  Journal Article
Zara, JM; Yazdanfar, S; Rao, KD; Izatt, JA; Smith, SW
Published in: Optics letters
April 2003

Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated by photolithography from polyimide-upon-silicon wafers. These devices were inserted into the scanning arm of an experimental OCT imaging system to produce in vitro and in vivo images at frame rates of 4 to 8 Hz.

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Published In

Optics letters

DOI

EISSN

1539-4794

ISSN

0146-9592

Publication Date

April 2003

Volume

28

Issue

8

Start / End Page

628 / 630

Related Subject Headings

  • Tomography
  • Optics
  • Electricity
  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering
  • 0906 Electrical and Electronic Engineering
  • 0206 Quantum Physics
  • 0205 Optical Physics
 

Citation

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Zara, J. M., Yazdanfar, S., Rao, K. D., Izatt, J. A., & Smith, S. W. (2003). Electrostatic micromachine scanning mirror for optical coherence tomography. Optics Letters, 28(8), 628–630. https://doi.org/10.1364/ol.28.000628
Zara, J. M., S. Yazdanfar, K. D. Rao, J. A. Izatt, and S. W. Smith. “Electrostatic micromachine scanning mirror for optical coherence tomography.Optics Letters 28, no. 8 (April 2003): 628–30. https://doi.org/10.1364/ol.28.000628.
Zara JM, Yazdanfar S, Rao KD, Izatt JA, Smith SW. Electrostatic micromachine scanning mirror for optical coherence tomography. Optics letters. 2003 Apr;28(8):628–30.
Zara, J. M., et al. “Electrostatic micromachine scanning mirror for optical coherence tomography.Optics Letters, vol. 28, no. 8, Apr. 2003, pp. 628–30. Epmc, doi:10.1364/ol.28.000628.
Zara JM, Yazdanfar S, Rao KD, Izatt JA, Smith SW. Electrostatic micromachine scanning mirror for optical coherence tomography. Optics letters. 2003 Apr;28(8):628–630.
Journal cover image

Published In

Optics letters

DOI

EISSN

1539-4794

ISSN

0146-9592

Publication Date

April 2003

Volume

28

Issue

8

Start / End Page

628 / 630

Related Subject Headings

  • Tomography
  • Optics
  • Electricity
  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering
  • 0906 Electrical and Electronic Engineering
  • 0206 Quantum Physics
  • 0205 Optical Physics