The effects and implications of ESD on semiconductor technology

Since the development and implementation of large scale and very large scale integration techniques (LSI and VLSI), manufacturers have become increasingly aware of the damaging and destructive properties of electrostatic discharge (ESD) on semiconductor materials. The author expresses the opinion that this phenomena has not been taken seriously until relatively recently, and although semiconductor manufacturers have observed the necessary precautions for many years the practice is only now diversifying into installation, assembly, servicing and repair operations. The generation of ESD and its damaging effects are described, and practical methods of protection are presented, including a check list of precautions that should be taken

Duke Scholars

Author April S. Brown Electrical and Computer Engineering