Fundamental reactions controlling anion exchange during the synthesis of Sb/As mixed-anion heterojunctions
Publication
, Journal Article
Brown, AS; Losurdo, M; Bruno, G; Brown, T; May, G
Published in: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
July 1, 2004
As/Sb and Sb/As anion exchange reactions to control heterojunction interface intermixing in mixed anion structure were investigated. The substrate temperature, anion flux exposure time, and incident anion molecular species were analyzed. The characterization of Sb/AS structures was done by Sb surface segregation and subsequent incorporate in epitaxial overlayers. The result show that As/Sb exchange was significant and enhanced by the use of dimer fluxes.
Duke Scholars
Published In
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
DOI
ISSN
1071-1023
Publication Date
July 1, 2004
Volume
22
Issue
4
Start / End Page
2244 / 2249
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4016 Materials engineering
- 0912 Materials Engineering
- 0901 Aerospace Engineering
- 0401 Atmospheric Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Brown, A. S., Losurdo, M., Bruno, G., Brown, T., & May, G. (2004). Fundamental reactions controlling anion exchange during the synthesis of Sb/As mixed-anion heterojunctions. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 22(4), 2244–2249. https://doi.org/10.1116/1.1775201
Brown, A. S., M. Losurdo, G. Bruno, T. Brown, and G. May. “Fundamental reactions controlling anion exchange during the synthesis of Sb/As mixed-anion heterojunctions.” Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22, no. 4 (July 1, 2004): 2244–49. https://doi.org/10.1116/1.1775201.
Brown AS, Losurdo M, Bruno G, Brown T, May G. Fundamental reactions controlling anion exchange during the synthesis of Sb/As mixed-anion heterojunctions. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004 Jul 1;22(4):2244–9.
Brown, A. S., et al. “Fundamental reactions controlling anion exchange during the synthesis of Sb/As mixed-anion heterojunctions.” Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 22, no. 4, July 2004, pp. 2244–49. Scopus, doi:10.1116/1.1775201.
Brown AS, Losurdo M, Bruno G, Brown T, May G. Fundamental reactions controlling anion exchange during the synthesis of Sb/As mixed-anion heterojunctions. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004 Jul 1;22(4):2244–2249.
Published In
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
DOI
ISSN
1071-1023
Publication Date
July 1, 2004
Volume
22
Issue
4
Start / End Page
2244 / 2249
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4016 Materials engineering
- 0912 Materials Engineering
- 0901 Aerospace Engineering
- 0401 Atmospheric Sciences