Thermal oxidation of silicon in the ultrathin regime
Publication
, Journal Article
Massoud, HZ
Published in: Solid-State Electronics
January 1, 1997
This article reviews our present understanding of silicon oxidation kinetics in the ultrathin-film regime. Experimental results obtained at the onset of oxidation at room temperature, low temperatures and high temperatures are divided into two phases. In the incubation phase observed at the onset of oxidation, the oxide does not grow. Following the incubation phase, the oxide growth phase begins. Modeling the incubation phase and the growth phase are then described and correlated. A model consistent with both sets of observations is introduced. This model considers the role of silicon-monoxide molecules and silicon self-vacancies in the incubation and growth phases. © 1997 Published by Elsevier Science Ltd.
Duke Scholars
Published In
Solid-State Electronics
DOI
ISSN
0038-1101
Publication Date
January 1, 1997
Volume
41
Issue
7
Start / End Page
929 / 934
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4009 Electronics, sensors and digital hardware
- 0906 Electrical and Electronic Engineering
- 0205 Optical Physics
- 0204 Condensed Matter Physics
Citation
APA
Chicago
ICMJE
MLA
NLM
Massoud, H. Z. (1997). Thermal oxidation of silicon in the ultrathin regime. Solid-State Electronics, 41(7), 929–934. https://doi.org/10.1016/S0038-1101(97)00001-4
Massoud, H. Z. “Thermal oxidation of silicon in the ultrathin regime.” Solid-State Electronics 41, no. 7 (January 1, 1997): 929–34. https://doi.org/10.1016/S0038-1101(97)00001-4.
Massoud HZ. Thermal oxidation of silicon in the ultrathin regime. Solid-State Electronics. 1997 Jan 1;41(7):929–34.
Massoud, H. Z. “Thermal oxidation of silicon in the ultrathin regime.” Solid-State Electronics, vol. 41, no. 7, Jan. 1997, pp. 929–34. Scopus, doi:10.1016/S0038-1101(97)00001-4.
Massoud HZ. Thermal oxidation of silicon in the ultrathin regime. Solid-State Electronics. 1997 Jan 1;41(7):929–934.
Published In
Solid-State Electronics
DOI
ISSN
0038-1101
Publication Date
January 1, 1997
Volume
41
Issue
7
Start / End Page
929 / 934
Related Subject Headings
- Applied Physics
- 5104 Condensed matter physics
- 4009 Electronics, sensors and digital hardware
- 0906 Electrical and Electronic Engineering
- 0205 Optical Physics
- 0204 Condensed Matter Physics