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Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques

Publication ,  Journal Article
Goodwin-Johansson, SH; Subrahmanyan, R; Floyd, CE; Massoud, HZ
Published in: IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
January 1, 1989

A new technique for the determination of twodimensional impurity profiles using methods developed for emission computed tomography is presented. Several one-dimensional impurity profiles obtained at different directions through the sample are used to reconstruct the twodimensional profile. A simulation study of the experiment is described, and the effects of various experimental and reconstruction parameters are discussed. Reconstructions of an area of 4 μm x 4 μm from thirteen one-dimensional measurements, with a resolution of 1000Å, are numerically possible. © 1989 IEEE

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Published In

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

DOI

EISSN

1937-4151

ISSN

0278-0070

Publication Date

January 1, 1989

Volume

8

Issue

4

Start / End Page

323 / 335

Related Subject Headings

  • Computer Hardware & Architecture
  • 4607 Graphics, augmented reality and games
  • 4009 Electronics, sensors and digital hardware
  • 1006 Computer Hardware
  • 0906 Electrical and Electronic Engineering
 

Citation

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Goodwin-Johansson, S. H., Subrahmanyan, R., Floyd, C. E., & Massoud, H. Z. (1989). Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 8(4), 323–335. https://doi.org/10.1109/43.29587
Goodwin-Johansson, S. H., R. Subrahmanyan, C. E. Floyd, and H. Z. Massoud. “Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques.” IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 8, no. 4 (January 1, 1989): 323–35. https://doi.org/10.1109/43.29587.
Goodwin-Johansson SH, Subrahmanyan R, Floyd CE, Massoud HZ. Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. 1989 Jan 1;8(4):323–35.
Goodwin-Johansson, S. H., et al. “Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques.” IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol. 8, no. 4, Jan. 1989, pp. 323–35. Scopus, doi:10.1109/43.29587.
Goodwin-Johansson SH, Subrahmanyan R, Floyd CE, Massoud HZ. Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. 1989 Jan 1;8(4):323–335.

Published In

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

DOI

EISSN

1937-4151

ISSN

0278-0070

Publication Date

January 1, 1989

Volume

8

Issue

4

Start / End Page

323 / 335

Related Subject Headings

  • Computer Hardware & Architecture
  • 4607 Graphics, augmented reality and games
  • 4009 Electronics, sensors and digital hardware
  • 1006 Computer Hardware
  • 0906 Electrical and Electronic Engineering