Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques
Publication
, Journal Article
Goodwin-Johansson, SH; Subrahmanyan, R; Floyd, CE; Massoud, HZ
Published in: IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
January 1, 1989
A new technique for the determination of twodimensional impurity profiles using methods developed for emission computed tomography is presented. Several one-dimensional impurity profiles obtained at different directions through the sample are used to reconstruct the twodimensional profile. A simulation study of the experiment is described, and the effects of various experimental and reconstruction parameters are discussed. Reconstructions of an area of 4 μm x 4 μm from thirteen one-dimensional measurements, with a resolution of 1000Å, are numerically possible. © 1989 IEEE
Duke Scholars
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Published In
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
DOI
EISSN
1937-4151
ISSN
0278-0070
Publication Date
January 1, 1989
Volume
8
Issue
4
Start / End Page
323 / 335
Related Subject Headings
- Computer Hardware & Architecture
- 4607 Graphics, augmented reality and games
- 4009 Electronics, sensors and digital hardware
- 1006 Computer Hardware
- 0906 Electrical and Electronic Engineering
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Goodwin-Johansson, S. H., Subrahmanyan, R., Floyd, C. E., & Massoud, H. Z. (1989). Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 8(4), 323–335. https://doi.org/10.1109/43.29587
Goodwin-Johansson, S. H., R. Subrahmanyan, C. E. Floyd, and H. Z. Massoud. “Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques.” IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 8, no. 4 (January 1, 1989): 323–35. https://doi.org/10.1109/43.29587.
Goodwin-Johansson SH, Subrahmanyan R, Floyd CE, Massoud HZ. Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. 1989 Jan 1;8(4):323–35.
Goodwin-Johansson, S. H., et al. “Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques.” IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, vol. 8, no. 4, Jan. 1989, pp. 323–35. Scopus, doi:10.1109/43.29587.
Goodwin-Johansson SH, Subrahmanyan R, Floyd CE, Massoud HZ. Two-Dimensional Impurity Profiling with Emission Computed Tomography Techniques. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. 1989 Jan 1;8(4):323–335.
Published In
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
DOI
EISSN
1937-4151
ISSN
0278-0070
Publication Date
January 1, 1989
Volume
8
Issue
4
Start / End Page
323 / 335
Related Subject Headings
- Computer Hardware & Architecture
- 4607 Graphics, augmented reality and games
- 4009 Electronics, sensors and digital hardware
- 1006 Computer Hardware
- 0906 Electrical and Electronic Engineering