A wide slit scanning method for measuring electron and ion beam profiles

In order to eliminate the problem of calibration in beam spot size measurements, a wide slit scanning technique has been developed. As the beam scans across the edge of a slit, the ions or electrons are collected, and the resulting signal is displayed on an oscilloscope. This trace is a two-dimensional picture of the convolution of the beam with the slit edge. A mathematical analysis of the signal allows the intensity distribution of the beam to be obtained. Experimental verification of the technique is described.

Duke Scholars

Author Richard B. Fair Electrical and Computer Engineering