Richard B. Fair
Lord-Chandran Distinguished Professor of Engineering
Dr. Fair is a Life Fellow of the IEEE and a Fellow of the Electrochemical Society. He has served as Associate Editor of the IEEE Transactions on Electron Devices (1990-1993) and is past Editor-In-Chief of the Proceedings of the IEEE (1993-2000). He received the IEEE Third Millennium Medal in 2000, and the 2003 Solid State Science and Technology Award from the Electrochemical Society. He has published 150 papers in technical journals, contributed chapters to 10 books, edited eight more books, and given over 115 invited talks.
Our research group will continue to be driven by applications for lab-on-a-chip technology. While funding for microfluidics devices and science is non-existent, applications in environmental engineering, biosensing, diagnostics, genomics, etc. continue to appear. Thus, we have created strategic alliances with faculty in ECE, CEE, chemistry, genomics, biochemistry, microsystems engineering, and computer science at Duke, DUHS, Harvard and Stanford as part of our new thrusts into applications-driven research in bio-fluidic systems. We have funding to glue these critical pieces together. We have also aligned with Advanced Liquid Logic for the development of a more stable electrowetting platform on which to develop applications. And we are working on an NSF grant with Nan Jokerst’s group and Krish’s on an adaptive lab chip to develop on-chip optical sensing and control. Additionally, we have DARPA funding with Stanford, Harvard, and ALL in developing a genomic engineering platform for synthetic biology. Also, we are starting a new NSF grant on airborne particle sensing with Desert Research Institute.
Our research group will continue to be driven by applications for lab-on-a-chip technology. While funding for microfluidics devices and science is non-existent, applications in environmental engineering, biosensing, diagnostics, genomics, etc. continue to appear. Thus, we have created strategic alliances with faculty in ECE, CEE, chemistry, genomics, biochemistry, microsystems engineering, and computer science at Duke, DUHS, Harvard and Stanford as part of our new thrusts into applications-driven research in bio-fluidic systems. We have funding to glue these critical pieces together. We have also aligned with Advanced Liquid Logic for the development of a more stable electrowetting platform on which to develop applications. And we are working on an NSF grant with Nan Jokerst’s group and Krish’s on an adaptive lab chip to develop on-chip optical sensing and control. Additionally, we have DARPA funding with Stanford, Harvard, and ALL in developing a genomic engineering platform for synthetic biology. Also, we are starting a new NSF grant on airborne particle sensing with Desert Research Institute.
Current Research Interests
Microfluidic systems for lab-on-a-chip applications based on electrowetting technology
Office Hours
MWF 1:30-3:00pm
Current Appointments & Affiliations
- Lord-Chandran Distinguished Professor of Engineering, Electrical and Computer Engineering, Pratt School of Engineering 2009
- Professor of Electrical and Computer Engineering, Electrical and Computer Engineering, Pratt School of Engineering 1981
- Affiliate of the Duke Initiative for Science & Society, Duke Science & Society, Initiatives 2014
Contact Information
- 3519 CIEMAS, Dept. of Electrical and Computer Engrg., Durham, NC 27708
- Box 90291, Durham, NC 27708-0291
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(919) 660-5277
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http://www.ee.duke.edu/research/microfluidics/
- Background
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Education, Training, & Certifications
- Ph.D., Duke University 1969
- M.S.E.E., Pennsylvania State University 1966
- B.S.E.E., Duke University 1964
- Recognition
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In the News
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MAR 27, 2017 Pratt School of Engineering -
SEP 16, 2014 Duke Today
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Awards & Honors
- Life Fellow. IEEE. 2009
- Gordon E. Moore Medal for Outstanding Achievement in Solid State Science and Technology. Electrochemical Society. 2003
- Third Millennium Medal. IEEE. 2000
- Professor James F. Gibbons Achievement Award. 4th International Conference on Advanced Thermal Processing. 1996
- Fellow. Electrochemical Society. 1994
- Fellow. Institute for Electrical and Electronics Engineers. 1990
- Research
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Selected Grants
- SHF: Medium: Microbiology on a Programmable Biochip: An Integrated Hardware/Software Digital Microfluidics Platform awarded by National Science Foundation 2017 - 2022
- Collaborative Research: Development of a Digital Microfluidic Impactor For One Minute Measurements of Main Inorganic Aerosol Species awarded by National Science Foundation 2014 - 2018
- CPS: Medium :Hardware/Software Co-Design for the Life Sciences: Towards a Programmable and Reconfigurable Lab-on Chip awarded by National Science Foundation 2011 - 2017
- SAGE: Software Actuated Genome Engineering on a Droplet Transport Platform awarded by Stanford University 2012 - 2015
- Multidisciplinary Neonatal Training Grant awarded by National Institutes of Health 2010 - 2015
- Continuous Sequencing-By-Synthesis Based on a Digital Microfluidic Platform awarded by National Institutes of Health 2007 - 2011
- SGER: The initial phase of development of digital microfluidic impactor awarded by National Science Foundation 2008 - 2011
- Collaborative Research on Electrowetting Microarray Printing System for Bioactive Tissue Construct Manufacturing awarded by National Science Foundation 2007 - 2010
- Droplet-Based Digital Microfluidic Genome Sequencing awarded by National Institutes of Health 2005 - 2007
- ITR: Collaborative Research: Reconfigurable Architectures for Bio-Molecular Detection: Modeling, Experimentation, and Optimization awarded by National Science Foundation 2003 - 2006
- Microdroplet-based PCR Platform for High-Throughout Genetic Analysis awarded by Lord Foundation of North Carolina 2002 - 2005
- Research in the Diffusion of Boron in Ultra Thin Silicon Dioxide Layers awarded by Lord Foundation of North Carolina 1997 - 1998
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External Relationships
- King and Spaulding
- Sidley and Austin
- Publications & Artistic Works
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Selected Publications
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Books
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Zhang, T., K. Chakrabarty, and R. B. Fair. Microelectrofluidic systems: Modeling and simulation, 2002.
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Academic Articles
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Huang, Shuquan, Jessica Connolly, Andrei Khlystov, and Richard B. Fair. “Digital Microfluidics for the Detection of Selected Inorganic Ions in Aerosols.” Sensors (Basel, Switzerland) 20, no. 5 (February 2020): E1281. https://doi.org/10.3390/s20051281.Full Text
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Madison, A. C., M. W. Royal, and R. B. Fair. “Piezo-driven acoustic streaming in an electrowetting-on-dielectric digital microfluidics device.” Microfluidics and Nanofluidics 21, no. 12 (December 1, 2017). https://doi.org/10.1007/s10404-017-2012-6.Full Text
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Madison, Andrew C., Matthew W. Royal, Frederic Vigneault, Liji Chen, Peter B. Griffin, Mark Horowitz, George M. Church, and Richard B. Fair. “Scalable Device for Automated Microbial Electroporation in a Digital Microfluidic Platform.” Acs Synthetic Biology 6, no. 9 (September 2017): 1701–9. https://doi.org/10.1021/acssynbio.7b00007.Full Text
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Fair, Richard B. “Demonstration of Automated Analysis of Multiple Analytes on an Integrated Digital Microfluidic Platform.” Clinical Chemistry 63, no. 5 (May 2017): 1038–39. https://doi.org/10.1373/clinchem.2016.266585.Full Text
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Moore, J. A., M. Nemat-Gorgani, A. C. Madison, M. A. Sandahl, S. Punnamaraju, A. E. Eckhardt, M. G. Pollack, et al. “Automated electrotransformation of Escherichia coli on a digital microfluidic platform using bioactivated magnetic beads.” Biomicrofluidics 11, no. 1 (January 2017): 014110. https://doi.org/10.1063/1.4975391.Full Text
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Madison, A. C., M. W. Royal, and R. B. Fair. “Fluid transport in partially shielded electrowetting on dielectric digital microfluidic devices.” Journal of Microelectromechanical Systems 25, no. 4 (August 1, 2016): 593–605. https://doi.org/10.1109/JMEMS.2016.2561699.Full Text
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Chen, L., and R. B. Fair. “Digital microfluidics chip with integrated intra-droplet magnetic bead manipulation.” Microfluidics and Nanofluidics 19, no. 6 (December 1, 2015): 1349–61. https://doi.org/10.1007/s10404-015-1650-9.Full Text
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Royal, M. W., N. M. Jokerst, and R. B. Fair. “Droplet-based sensing: Optical microresonator sensors embedded in digital electrowetting microfluidics systems.” Ieee Sensors Journal 13, no. 12 (October 21, 2013): 4733–42. https://doi.org/10.1109/JSEN.2013.2273828.Full Text
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Hu, K., B. N. Hsu, A. Madison, K. Chakrabarty, and R. Fair. “Fault detection, real-time error recovery, and experimental demonstration for digital microfluidic biochips.” Proceedings Design, Automation and Test in Europe, Date, January 1, 2013, 559–64. https://doi.org/10.7873/date.2013.124.Full Text
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Sandahl, M., S. Punnamaraju, A. Madison, J. Harrington, M. Royal, R. Fair, A. Eckhardt, A. Sudarsan, and M. Pollack. “Software automated genomic engineering (SAGE) enabled by electrowetting-on-dielectric digital microfluidics.” 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Microtas 2013 2 (January 1, 2013): 1260–63.
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Royal, M. W., N. M. Jokerst, and R. B. Fair. “Integrated sample preparation and sensing: Polymer microresonator sensors embedded in digital electrowetting microfluidic systems.” Ieee Photonics Journal 4, no. 6 (December 10, 2012): 2126–35. https://doi.org/10.1109/JPHOT.2012.2226873.Full Text
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Khlystov, A., B. N. Hsu, and R. Fair. “Development of digital microfluidic impactor for online determination of sulfate.” Air and Waste Management Association Air Quality Measurement Methods and Technology Conference 2012, December 1, 2012, 105–9.
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Lin, Yan-You, Erin R. F. Welch, and Richard B. Fair. “Low voltage picoliter droplet manipulation utilizing electrowetting-on-dielectric platforms.” Sensors and Actuators. B, Chemical 173 (October 2012): 338–45. https://doi.org/10.1016/j.snb.2012.07.022.Full Text
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Luan, L., M. W. Royal, R. Evans, R. B. Fair, and N. M. Jokerst. “Chip scale optical microresonator sensors integrated with embedded thin film photodetectors on electrowetting digital microfluidics platforms.” Ieee Sensors Journal 12, no. 6 (May 8, 2012): 1794–1800. https://doi.org/10.1109/JSEN.2011.2179027.Full Text
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Hsu, B. N., A. C. Madison, and R. B. Fair. “Accelerate sepsis diagnosis by seamless integration of DNA purification and QPCR.” Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Microtas 2012, January 1, 2012, 830–32.
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Royal, M. W., R. B. Fair, and N. M. Jokerst. “Integrated sample preparation and sensing: Microresonator optical sensors embedded in digital electrowetting microfluidics systems.” Proceedings of Ieee Sensors, December 1, 2011, 2050–53. https://doi.org/10.1109/ICSENS.2011.6127195.Full Text
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Boles, Deborah J., Jonathan L. Benton, Germaine J. Siew, Miriam H. Levy, Prasanna K. Thwar, Melissa A. Sandahl, Jeremy L. Rouse, et al. “Droplet-based pyrosequencing using digital microfluidics.” Analytical Chemistry 83, no. 22 (November 2011): 8439–47. https://doi.org/10.1021/ac201416j.Full Text
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Welch, Erin R Ferguson, Yan-You Lin, Andrew Madison, and Richard B. Fair. “Picoliter DNA sequencing chemistry on an electrowetting-based digital microfluidic platform.” Biotechnology Journal 6, no. 2 (February 2011): 165–76. https://doi.org/10.1002/biot.201000324.Full Text
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Fair, R. B. “Parallel processing of multifunctional, point-of-care bio-applications on electrowetting chips.” 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, Microtas 2010 3 (December 1, 2010): 2095–97.
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Lin, Yan-You, Randall D. Evans, Erin Welch, Bang-Ning Hsu, Andrew C. Madison, and Richard B. Fair. “Low Voltage Electrowetting-on-Dielectric Platform using Multi-Layer Insulators.” Sensors and Actuators. B, Chemical 150, no. 1 (September 2010): 465–70. https://doi.org/10.1016/j.snb.2010.06.059.Full Text
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Chakrabarty, K., R. B. Fair, and J. Zeng. “Design tools for digital microfluidic biochips: Toward functional diversification and more than Moore.” Ieee Transactions on Computer Aided Design of Integrated Circuits and Systems 29, no. 7 (July 1, 2010): 1001–17. https://doi.org/10.1109/TCAD.2010.2049153.Full Text
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Fair, R. B. “Scaling fundamentals and applications of digital microfluidic microsystems.” Nato Science for Peace and Security Series A: Chemistry and Biology, January 1, 2010, 285–304. https://doi.org/10.1007/978-90-481-9029-4_16.Full Text
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Geisler, C. G., D. M. Wootton, P. I. Lelkes, R. Fair, and J. G. Zhou. “Material study for electrowetting-based multi-microfluidics array printing of high resolution tissue construct with embedded cells and growth factors.” Proceedings of the Asme 1st Global Congress on Nanoengineering for Medicine and Biology 2010, Nemb2010, January 1, 2010, 191–93. https://doi.org/10.1115/nemb2010-13048.Full Text
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Fair, R. B. “Digital microfluidic chips for chemical and biological applications.” Conference Proceedings : ... Annual International Conference of the Ieee Engineering in Medicine and Biology Society. Ieee Engineering in Medicine and Biology Society. Conference, December 1, 2009, 6560–64.
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Fair, R. B. “Digital microfluidic chips for chemical and biological applications.” Annual International Conference of the Ieee Engineering in Medicine and Biology Society. Ieee Engineering in Medicine and Biology Society. Annual International Conference 2009 (January 2009): 6560–64. https://doi.org/10.1109/iembs.2009.5334498.Full Text
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Song, J. H., R. Evans, Y. Y. Lin, B. N. Hsu, and R. B. Fair. “A scaling model for electrowetting-on-dielectric microfluidic actuators.” Microfluidics and Nanofluidics 7, no. 1 (January 1, 2009): 75–89. https://doi.org/10.1007/s10404-008-0360-y.Full Text
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Luan, L., R. D. Evans, D. Schwinn, R. B. Fair, and N. M. Jokerst. “Chip scale integration of optical microresonator sensors with digital microfludics systems.” Conference Proceedings Lasers and Electro Optics Society Annual Meeting Leos, December 1, 2008, 259–60. https://doi.org/10.1109/LEOS.2008.4688588.Full Text
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Luan, L., R. D. Evans, N. M. Jokerst, and R. B. Fair. “Integrated optical sensor in a digital microfluidic platform.” Ieee Sensors Journal 8, no. 5 (May 1, 2008): 628–35. https://doi.org/10.1109/JSEN.2008.918717.Full Text
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Nagle, H. T., R. B. Fair, M. A. Shannon, O. K. Tan, O. Geschke, C. H. Ahn, O. Kaynak, and M. J. Vellekoop. “Editorial introduction for the special issue on sensors for microfluidic analysis systems.” Ieee Sensors Journal 8, no. 5 (May 1, 2008): 427–29. https://doi.org/10.1109/JSEN.2008.925070.Full Text
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Evans, R., L. Luan, N. M. Jokerst, and R. B. Fair. “Optical detection heterogeneously integrated with a coplanar digital microfluidic lab-on-a-chip platform.” Proceedings of Ieee Sensors, December 1, 2007, 423–26. https://doi.org/10.1109/ICSENS.2007.4388426.Full Text
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Zhou, J., L. Lu, K. Byrapogu, D. M. Wootton, P. I. Lelkes, and R. Fair. “Electrowetting-based multi-microfluidics array printing of high resolution tissue construct with embedded cells and growth factors.” Virtual and Physical Prototyping 2, no. 4 (December 1, 2007): 217–23. https://doi.org/10.1080/17452750701747278.Full Text
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Zhou, J., L. Lu, K. Byrapogu, D. Wootton, P. Lelkes, and R. Fair. “Electrowetting based multi-microfluidics array printing of high resolution tissue construct with embedded cells and growth factors.” Proceedings of the 3rd International Conference on Advanced Research in Virtual and Rapid Prototyping: Virtual and Rapid Manufacturing Advanced Research Virtual and Rapid Prototyping, December 1, 2007, 265–74.
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Fair, R. B. “Digital microfluidics: Is a true lab-on-a-chip possible?” Microfluidics and Nanofluidics 3, no. 3 (June 1, 2007): 245–81. https://doi.org/10.1007/s10404-007-0161-8.Full Text
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Fair, R. B., A. Khlystov, T. D. Tailor, V. Ivanov, R. D. Evans, V. Srinivasan, V. K. Pamula, M. G. Pollack, P. B. Griffin, and J. Zhou. “Chemical and biological applications of digital-microfluidic devices.” Ieee Design and Test of Computers 24, no. 1 (January 1, 2007): 10–24. https://doi.org/10.1109/MDT.2007.8.Full Text Open Access Copy
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Khlystov, A. Y., Y. Ma, and R. Fair. “Development of digital microfluidic impactor for real-time measurements of the aerosol chemical composition.” Air and Waste Management Association Symposium on Air Quality Measurement: Methods and Technology 2006, December 1, 2006, 191–95.
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Su, F., K. Chakrabarty, and R. B. Fair. “Microfluidics-based biochips: Technology issues, implementation platforms, and design automation challenges,” December 1, 2006, 1–29. https://doi.org/10.1007/1-4020-5123-9_1.Full Text
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Su, F., K. Chakrabarty, and R. B. Fair. “Microfluidics-based biochips: Technology issues, implementation platforms, and design-automation challenges.” Ieee Transactions on Computer Aided Design of Integrated Circuits and Systems 25, no. 2 (February 1, 2006): 211–23. https://doi.org/10.1109/TCAD.2005.855956.Full Text
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Pamula, V. K., V. Srinivasan, H. Chakrapani, R. B. Fair, and E. J. Toone. “A droplet-based lab-on-a-chip for colorimetric detection of nitroaromatic explosives.” Proceedings of the Ieee International Conference on Micro Electro Mechanical Systems (Mems), October 25, 2005, 722–25. https://doi.org/10.1109/MEMSYS.2005.1454031.Full Text
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Fair, R. B., A. Khlystov, V. Srinivasan, V. K. Pamula, and K. N. Weaver. “Integrated chemical/biochemical sample collection, pre-concentration, and analysis on a digital microfluidic lab-on-a-chip platform.” Proceedings of Spie the International Society for Optical Engineering 5591 (December 1, 2004): 113–24. https://doi.org/10.1117/12.581955.Full Text
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Srinivasan, V., V. Pamula, P. Paik, and R. Fair. “Protein stamping for maldi mass spectrometry using AN electrowetting-based microfluidic platform.” Proceedings of Spie the International Society for Optical Engineering 5591 (December 1, 2004): 26–32. https://doi.org/10.1117/12.580145.Full Text
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Srinivasan, Vijay, Vamsee K. Pamula, and Richard B. Fair. “An integrated digital microfluidic lab-on-a-chip for clinical diagnostics on human physiological fluids.” Lab on a Chip 4, no. 4 (August 2004): 310–15. https://doi.org/10.1039/b403341h.Full Text
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Srinivasan, V., V. K. Pamula, and R. B. Fair. “Droplet-based microfluidic lab-on-a-chip for glucose detection.” Analytica Chimica Acta 507, no. 1 (April 1, 2004): 145–50. https://doi.org/10.1016/j.aca.2003.12.030.Full Text
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Ren, H., R. B. Fair, and M. G. Pollack. “Automated on-chip droplet dispensing with volume control by electro-wetting actuation and capacitance metering.” Sensors and Actuators, B: Chemical 98, no. 2–3 (March 15, 2004): 319–27. https://doi.org/10.1016/j.snb.2003.09.030.Full Text
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Lee, A., and R. B. Fair. “Special issue on biomedical applications for MEMS and microfluidics.” Proceedings of the Ieee 92, no. 1 (January 1, 2004): 3–5. https://doi.org/10.1109/JPROC.2003.820530.Full Text
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Zhang, Tianhao, Krishnendu Chakrabarty, and Richard B. Fair. “Behavioral modeling and performance evaluation of microelectrofluidics- based PCR systems using systemC.” Ieee Transactions on Computer Aided Design of Integrated Circuits and Systems 23, no. 6 (2004): 843–58. https://doi.org/10.1109/TCAD.2004.828115.Full Text Link to Item
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Fair, R. B., V. Srinivasan, H. Ren, P. Paik, V. K. Pamula, and M. G. Pollack. “Electrowetting-Based On-Chip Sample Processing for Integrated Microfluidics.” Technical Digest International Electron Devices Meeting, December 1, 2003, 779–82.
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Paik, Phil, Vamsee K. Pamula, and Richard B. Fair. “Rapid droplet mixers for digital microfluidic systems.” Lab on a Chip 3, no. 4 (November 2003): 253–59. https://doi.org/10.1039/b307628h.Full Text
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Srinivasan, V., V. Pamula, M. Pollack, and R. Fair. “A digital microfluidic biosensor for multianalyte detection.” Proceedings of the Ieee Micro Electro Mechanical Systems (Mems), July 23, 2003, 327–30.
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Paik, Phil, Vamsee K. Pamula, Michael G. Pollack, and Richard B. Fair. “Electrowetting-based droplet mixers for microfluidic systems.” Lab on a Chip 3, no. 1 (February 2003): 28–33. https://doi.org/10.1039/b210825a.Full Text
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Zhang, T., K. Chakrabarty, and R. B. Fair. “System performance evaluation with systemC for two PCR microelectrofluidic systems.” 2002 International Conference on Modeling and Simulation of Microsystems Msm 2002, December 1, 2002, 48–53.
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Zhang, T., K. Chakrabarty, and R. B. Fair. “Integrated hierarchical design of microelectrofluidic systems using SystemC.” 2002 International Conference on Modeling and Simulation of Microsystems Msm 2002, December 1, 2002, 144–49.
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Ren, H., R. B. Fair, M. G. Pollack, and E. J. Shaughnessy. “Dynamics of electro-wetting droplet transport.” Sensors and Actuators, B: Chemical 87, no. 1 (November 15, 2002): 201–6. https://doi.org/10.1016/S0925-4005(02)00223-X.Full Text
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Pollack, M. G., A. D. Shenderov, and R. B. Fair. “Electrowetting-based actuation of droplets for integrated microfluidics.” Lab on a Chip 2, no. 2 (May 2002): 96–101. https://doi.org/10.1039/b110474h.Full Text
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Zhang, Tianhao, Krishnendu Chakrabarty, and Richard B. Fair. “Integrated hierarchical design of microelectrofluidic systems using SystemC.” Microelectronics Journal 33, no. 5–6 (2002): 459–70. https://doi.org/10.1016/S0026-2692(01)00157-4.Full Text Link to Item
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Zhang, Tianhao, Krishnendu Chakrabarty, and Richard B. Fair. “Design of reconfigurable composite microsystems based on hardware/software codesign principles.” Ieee Transactions on Computer Aided Design of Integrated Circuits and Systems 21, no. 8 (2002): 987–95. https://doi.org/10.1109/TCAD.2002.800455.Full Text Link to Item
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Ding, J., K. Chakrabarty, and R. B. Fair. “Scheduling of microfluidic operations for reconfigurable two-dimensional electrowetting arrays.” Ieee Transactions on Computer Aided Design of Integrated Circuits and Systems 20, no. 12 (December 1, 2001): 1463–68. https://doi.org/10.1109/43.969439.Full Text
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Ding, J., K. Chakrabarty, and R. B. Fair. “Reconfigurable microfluidic system architecture based on two-dimensional electrowetting arrays.” 2001 International Conference on Modeling and Simulation of Microsystems Msm 2001, December 1, 2001, 181–85.
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Fair, R. B., M. G. Pollack, R. Woo, V. K. Pamula, R. Hong, T. Zhang, and J. Venkatraman. “A micro-watt metal-insulator-solution-transport (MIST) device for scalable digital bio-microfluidic systems.” Technical Digest International Electron Devices Meeting, December 1, 2001, 367–70.
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Jopling, J., D. Rose, and R. Fair. “The coupled-domain system simulation/simulatability problem.” 2001 International Conference on Modeling and Simulation of Microsystems Msm 2001, December 1, 2001, 116–19.
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Pamula, V. K., A. Jog, and R. B. Fair. “Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams.” 2001 International Conference on Modeling and Simulation of Microsystems Msm 2001, December 1, 2001, 410–13.
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Ren, H., A. Jog, and R. B. Fair. “Statistical optimal design of microelectromechanical system (MEMS).” 2001 International Conference on Modeling and Simulation of Microsystems Msm 2001, December 1, 2001, 169–72.
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Srinivasan, V., A. Jog, and R. B. Fair. “Scalable macromodels for microelectromechanical systems.” 2001 International Conference on Modeling and Simulation of Microsystems Msm 2001, December 1, 2001, 72–75.
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Zhang, T., K. Chakrabarty, and R. B. Fair. “Design of reconfigurable composite microsystems based on hardware/software co-design principles 1.” 2001 International Conference on Modeling and Simulation of Microsystems Msm 2001, December 1, 2001, 148–52.
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Zhang, T. H., F. Cao, A. M. Dewey, R. B. Fair, and K. Chakrabarty. “Performance analysis of microelectrofluidic systems using hierarchical modeling and simulation (vol 48, pg 482, 2001).” Ieee Transactions on Circuits and Systems Ii Analog and Digital Signal Processing 48, no. 7 (July 1, 2001): 749–749.Link to Item
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Zhang, T., F. Cao, A. M. Dewey, R. B. Fair, and K. Chakrabarty. “Corrections to “Performance Analysis of Microelectrofluidic Systems Using Hierarchical Modeling and Simulation”.” Ieee Transactions on Circuits and Systems Ii: Analog and Digital Signal Processing 48, no. 7 (January 1, 2001): 749. https://doi.org/10.1109/TCSII.2001.958347.Full Text
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Zhang, T., F. Cao, A. M. Dewey, R. B. Fair, and K. Chakrabarty. “Performance analysis of microelectrofluidic systems using hierarchical modeling and simulation.” Ieee Transactions on Circuits and Systems Ii: Analog and Digital Signal Processing 48, no. 5 (2001): 482–91. https://doi.org/10.1109/82.938358.Full Text Link to Item
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Dewey, A., R. Fair, J. Jopling, J. Ding, T. Zhang, F. Cao, B. Schreiner, and M. Pollack. “Towards microelectrofluidic system (MEFS) computing and architecture.” 2000 International Conference on Modeling and Simulation of Microsystems Msm 2000, December 1, 2000, 142–45.
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Pollack, M. G., R. B. Fair, and A. D. Shenderov. “Electrowetting-based actuation of liquid droplets for microfluidic applications.” Applied Physics Letters 77, no. 11 (September 11, 2000): 1725–26. https://doi.org/10.1063/1.1308534.Full Text
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Fair, R. B. “A historical view of the role of ion-implantation defects in PN junction formation for devices.” Materials Research Society Symposium Proceedings 610 (January 1, 2000). https://doi.org/10.1557/proc-610-b4.1.Full Text
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Pamula, V. K., and R. B. Fair. “Detection of dissolved TNT and DNT in soil with a MEMS explosive particle detector.” Proceedings of Spie the International Society for Optical Engineering 4038 (January 1, 2000).
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Pamula, V. K., and R. B. Fair. “Detection of dissolved TNT and DNT in soil with a MEMS explosive particle detector.” Proceedings of Spie the International Society for Optical Engineering 4038 (2000): I/-.
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Zhang, T., A. Dewey, and R. Fair. “A hierarchical approach to stochastic discrete and continuous performance simulation using composable software components.” Microelectronics Journal 31, no. 2 (January 1, 2000): 95–104. https://doi.org/10.1016/S0026-2692(99)00095-6.Full Text
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Fair, R. B. “Anomalous B penetration through ultrathin gate oxides during rapid thermal annealing.” Ieee Electron Device Letters 20, no. 9 (September 1, 1999): 466–69. https://doi.org/10.1109/55.784454.Full Text
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Vasudevan, N., H. Z. Massoud, and R. B. Fair. “Thermal model for the initiation of programming in metal-to-metal amorphous-silicon antifuses.” Journal of the Electrochemical Society 146, no. 4 (April 1, 1999): 1536–39. https://doi.org/10.1149/1.1391800.Full Text
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Pamula, V. K., and R. B. Fair. “Detection of nanogram explosive particles with a MEMS sensor.” Proceedings of Spie the International Society for Optical Engineering 3710, no. I (January 1, 1999): 321–27.
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Wu, Y., H. Niimi, H. Yang, G. Lucovsky, and R. B. Fair. “Suppression of boron transport out of p+ polycrystalline silicon at polycrystalline silicon dielectric interfaces.” J. Vac. Sci. Technol. B, Microelectron. Nanometer Struct. (Usa) 17, no. 4 (1999): 1813–22. https://doi.org/10.1116/1.590832.Full Text Link to Item
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Fair, R. B., M. Pollack, and V. K. Pamula. “MEMS devices for detecting the presence of explosive material residues in mine fields.” Proceedings of Spie the International Society for Optical Engineering 3392 (December 1, 1998): 409–17. https://doi.org/10.1117/12.324214.Full Text
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Vasudevan, N., R. B. Fair, H. Z. Massoud, T. Zhao, K. Look, Y. Karpovich, and M. J. Hart. “ON-state reliability of amorphous-silicon antifuses.” Journal of Applied Physics 84, no. 11 (December 1, 1998): 6440–47. https://doi.org/10.1063/1.368884.Full Text
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Vasudevan, N., R. B. Fair, and H. Z. Massoud. “Energy considerations during the growth of a molten filament in metal-to-metal amorphous-silicon antifuses.” Journal of Applied Physics 84, no. 9 (November 1, 1998): 4979–83. https://doi.org/10.1063/1.368743.Full Text
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Fair, R. B., and S. Li. “Photonic effects in the deactivation of ion implanted arsenic.” Journal of Applied Physics 83, no. 8 (April 15, 1998): 4081–90. https://doi.org/10.1063/1.367228.Full Text
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Fair, R. B. “History of some early developments in ion-implantation technology leading to silicon transistor manufacturing.” Proceedings of the Ieee 86, no. 1 (January 1, 1998): 111–37. https://doi.org/10.1109/5.658764.Full Text
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Tsuei, T. W., R. L. Wood, C. Khan Malek, M. M. Donnelly, and R. B. Fair. “Tapered microvalves fabricated by off-axis X-ray exposures.” Microsystem Technologies 4, no. 4 (January 1, 1998): 201–4. https://doi.org/10.1007/s005420050131.Full Text
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Fair, R. B., V. Pamula, and M. Pollack. “MEMS-based explosive particle detection and remote particle stimulation.” Proceedings of Spie the International Society for Optical Engineering 3079 (December 1, 1997): 671–79.
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Chen, G., T. Borca-Tasciuc, and R. B. Fair. “Photon effect on radiative properties of silicon during rapid thermal processing.” Journal of Applied Physics 82, no. 2 (July 15, 1997): 830–35. https://doi.org/10.1063/1.365780.Full Text
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Fair, R. B. “Modeling boron diffusion in ultrathin nitrided oxide p + Si gate technology.” Ieee Electron Device Letters 18, no. 6 (June 1, 1997): 244–47. https://doi.org/10.1109/55.585342.Full Text
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Fair, R. B. “Physical models of boron diffusion in ultrathin gate oxides.” Journal of the Electrochemical Society 144, no. 2 (January 1, 1997): 708–17. https://doi.org/10.1149/1.1837473.Full Text
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Fair, R. B., and J. Calder. “Focus on the Future.” Proceedings of the Ieee 85, no. 11 (January 1, 1997): 1673–74. https://doi.org/10.1109/JPROC.1997.649643.Full Text
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Fair, R. B., and M. Shen. “Ultra-shallow 2D dopant profile simulation versus experimental measurement in the low thermal budget regime.” Measurement, Characterization and Modeling of Ultra Shallow Doping Profiles in Semiconductors, 1997.
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Bobbio, S. M., S. W. Smith, S. Goodwin Johansson, R. B. Fair, T. D. DuBois, F. M. Tranjan, J. Hudak, R. Gupta, and H. Makki. “Integrated force array: interface to external systems.” Proc. Spie Int. Soc. Opt. Eng. (Usa) 3046 (1997): 248–59.
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Fair, R. B., and R. A. Gafiteanu. “Modeling boron diffusion in thin-oxide p+ Si gate technology.” Ieee Electron Device Letters 17, no. 11 (November 1, 1996): 497–99. https://doi.org/10.1109/55.541760.Full Text
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Fair, R. B. “Oxide thickness effect on boron diffusion in thin oxide p+ Si gate technology.” Ieee Electron Device Letters 17, no. 5 (May 1, 1996): 242–43. https://doi.org/10.1109/55.491842.Full Text
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Bobbio, S. M., S. Goodwin-Johansson, T. D. DuBois, F. M. Tranjan, S. W. Smith, R. B. Fair, C. Ball, et al. “Integrated force array: positioning drive applications.” Proceedings of Spie the International Society for Optical Engineering 2722 (January 1, 1996): 123–34.
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Fair, R. B. “Unified model of boron diffusion in thin gate oxides: effects of F, H2, N, oxide thickness and injected Si interstitials.” Technical Digest International Electron Devices Meeting, December 1, 1995, 85–88.
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Mirabedini, R. R., S. H. Goodwin-Johansson, H. Z. Massoud, and R. B. Fair. “Subquarter-mícrometre elevated source-and-drain MOSFET structure using polysilicon spacers.” Electronics Letters 30, no. 19 (January 1, 1994): 1631–32. https://doi.org/10.1049/el:19941068.Full Text
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Fair, R. B., and I. Turlik. “Proof-concept collaboration model for advanced packaging research at MCNC.” Proceedings of Spie the International Society for Optical Engineering 1986 (December 1, 1993): 552–55.
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Neuman, M. R., R. B. Fair, M. Mehragany, and H. Z. Massoud. “Microelectromechanical systems: a new technology for biomedical applications.” Proceedings of the Annual Conference on Engineering in Medicine and Biology 15, no. pt 3 (December 1, 1993): 1545–46.
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Fair, R. B. “Junction formation in silicon by rapid thermal annealing.” Materials Research Society Symposium Proceedings 303 (January 1, 1993): 311–24. https://doi.org/10.1557/proc-303-311.Full Text
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Fair, R. B. “Junction formation in silicon by rapid thermal annealing.” Materials Research Society Symposium Proceedings 300 (January 1, 1993): 545–58. https://doi.org/10.1557/proc-300-545.Full Text
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Fair, R. B. E., and L. E. Preston. “Engineering Research Centers: goals and results.” Proc. Ieee (Usa) 81, no. 1 (1993): 3–9.
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Fair, R. B., and J. F. Freedman. “Technology transfer utilizing the proof-of-concept facility.” Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop, January 1, 1992, 66–68.
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Fair, R. B. “Challenges and priorities for two dimensional process simulation.” Proceedings the Electrochemical Society 91, no. 4 (January 1, 1991): 689–702.
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Fair, R. B., C. L. Gardner, D. J. Rose, M. J. Johnson, S. W. Kenkel, J. E. Rose, and R. Subrahmanyan. “TwoDimensional Process Simulation Using Verified Phenomenological Models.” Ieee Transactions on Computer Aided Design of Integrated Circuits and Systems 10, no. 5 (January 1, 1991): 643–51. https://doi.org/10.1109/43.79501.Full Text
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Kim, Y., H. Z. Massoud, U. M. Goesele, and R. B. Fair. “Physical modeling of the time constant of transient enhancement in the diffusion of ion-implanted dopants in silicon.” Proceedings the Electrochemical Society 91, no. 4 (January 1, 1991): 254–72.
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Kim, Y., T. Y. Tan, H. Z. Massoud, and R. B. Fair. “Modeling the enhanced diffusion of implanted boron in silicon.” Proceedings the Electrochemical Society 91, no. 4 (January 1, 1991): 304–20.
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Fair, R. B. “Process model for simulating the effect of amorphizing implants on phosphorus diffusion.” Proceedings the Electrochemical Society 90, no. 7 (December 1, 1990): 429–36.
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Kim, Y., H. Z. Massoud, S. Chevacharoeukul, and R. B. Fair. “Role of end-of-range dislocation loops as a diffusion barrier.” Proceedings the Electrochemical Society 90, no. 7 (December 1, 1990): 437–46.
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Ward, R. R., H. Z. Massoud, and R. B. Fair. “Thermal oxidation of heavily doped silicon in the thin-film regime. Dopant behavior and modeling growth kinetics.” Proceedings the Electrochemical Society 90, no. 7 (December 1, 1990): 405–16.
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Fair, R. B., and G. A. Ruggles. “Thermal budget issues for deep submicron ULSI.” Solid State Technology 33, no. 5 (May 1, 1990): 107–13.
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Fair, R. B. “Damage Removal/Dopant Diffusion Tradeoffs in Ultra-Shallow Implanted p+-n Junctions.” Ieee Transactions on Electron Devices 37, no. 10 (January 1, 1990): 2237–42. https://doi.org/10.1109/16.59914.Full Text
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Fair, R. B. “Point Defect Charge-State Effects on Transient Diffusion of Dopants in Si.” Journal of the Electrochemical Society 137, no. 2 (January 1, 1990): 667–71. https://doi.org/10.1149/1.2086528.Full Text
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Fair, R. B. “Challenges to Manufacturing Submicron, Ultra-Large Scale Integrated Circuits.” Proceedings of the Ieee 78, no. 11 (January 1, 1990): 1687–1705. https://doi.org/10.1109/5.63298.Full Text
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Kim, Y., H. Z. Massoud, and R. B. Fair. “The Effect of Annealing Ambient on Dopant Diffusion in Silicon during Low-Temperature Processing.” Journal of the Electrochemical Society 137, no. 8 (January 1, 1990): 2599–2603. https://doi.org/10.1149/1.2086994.Full Text
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Subrahmanyan, R., H. Z. Massoud, and R. B. Fair. “Comparison of Measured and Simulated Two-Dimensional Phosphorus Diffusion Profiles in Silicon.” Journal of the Electrochemical Society 137, no. 5 (January 1, 1990): 1573–79. https://doi.org/10.1149/1.2086729.Full Text
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Tsai, J. C. C., D. G. Schimmel, R. E. Ahrens, and R. B. Fair. “Point defect generation during phosphorus diffusion in silicon. II. Concentrations below solid solubility, ion-implanted phosphorus.” J. Electrochem. Soc. (Usa) 134, no. 9 (1990): 2348–56.
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Fair, R. B. “Diffusion and oxidation of silicon.” Advances in Chemistry Series, no. 221 (December 1, 1989): 265–323.
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Fair, R. B. “Shallow junctions--Modeling the dominance of point defect charge states during transient diffusion.” Technical Digest International Electron Devices Meeting, December 1, 1989, 691–94.
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Rogers, W. B., H. Z. Massoud, R. B. Fair, U. M. Gösele, T. Y. Tan, and G. A. Rozgonyi. “The role of silicon self-interstitial supersaturation in the retardation of oxygen precipitation in Czochralski silicon.” Journal of Applied Physics 65, no. 11 (December 1, 1989): 4215–19. https://doi.org/10.1063/1.343303.Full Text
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Kim, Y., H. Z. Massoud, and R. B. Fair. “The effect of ion-implantation damage on dopant diffusion in silicon during shallow-junction formation.” Journal of Electronic Materials 18, no. 2 (March 1, 1989): 143–50. https://doi.org/10.1007/BF02657400.Full Text
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Fair, R. B. “The role of transient damage annealing in shallow junction formation.” Nuclear Inst. and Methods in Physics Research, B 37–38, no. C (February 2, 1989): 371–78. https://doi.org/10.1016/0168-583X(89)90206-1.Full Text
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Fair, R. B. “The role of transient damage annealing in shallow junction formation.” Nuclear Inst. and Methods in Physics Research, B 37–38, no. C (1989): 371–78.
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Fair, R. B., and R. Subrahmanyan. “Phenomenological versus point-defect-based process modeling. Where should you put your money?” Proceedings the Electrochemical Society 89, no. 9 (1989): 133.
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Subrahmanyan, Ravi, Hisham Z. Massoud, and Richard B. Fair. “Accurate junction-depth measurements using chemical staining.” Astm Special Technical Publication, no. 990 (1989): 126.
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Ajmera, A. C., G. A. Rozgonyi, and R. B. Fair. “Point defect/dopant diffusion considerations following preamorphization of silicon via Si+ and Ge+ implantation.” Applied Physics Letters 52, no. 10 (December 1, 1988): 813–15. https://doi.org/10.1063/1.99292.Full Text
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Kim, Y., H. Z. Massoud, and R. B. Fair. “Boron profile changes during low-temperature annealing of BF +2-implanted silicon.” Applied Physics Letters 53, no. 22 (December 1, 1988): 2197–99. https://doi.org/10.1063/1.100505.Full Text
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Ozturk, M. C., J. J. Wortman, and R. B. Fair. “Very shallow p+-n junction formation by low-energy BF 2+ ion implantation into crystalline and germanium preamorphized silicon.” Applied Physics Letters 52, no. 12 (December 1, 1988): 963–65. https://doi.org/10.1063/1.99242.Full Text
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Subrahmanyan, R., H. Z. Massoud, and R. B. Fair. “Experimental characterization of two-dimensional dopant profiles in silicon using chemical staining.” Applied Physics Letters 52, no. 25 (December 1, 1988): 2145–47. https://doi.org/10.1063/1.99559.Full Text
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KIM, Y., R. B. FAIR, and H. Z. MASSOUD. “ON THE ROLE OF ION-IMPLANTATION DAMAGE IN SILICON ON DOPANT DIFFUSION FOR SHALLOW JUNCTION FORMATION.” Journal of Electronic Materials 17, no. 4 (July 1, 1988): S26–S26.Link to Item
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Fair, R. B. “Low-Thermal-Budget Process Modeling with the PREDICT™ Computer Program.” Ieee Transactions on Electron Devices 35, no. 3 (January 1, 1988): 285–93. https://doi.org/10.1109/16.2452.Full Text
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Fair, R. B., and J. E. Rose. “PROCESS SIMULATION OF SUBMICRON TECHNOLOGIES.” Semiconductor International 10, no. 13 (December 1, 1987): 72–75.
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Fair, R. B., and J. E. Rose. “DEEP DECISION TREE APPROACH TO MODELING SUBMICRON SILICON TECHNOLOGIES.,” December 1, 1987, 248–51.
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Subrahmanyan, R., H. Z. Massoud, and R. B. Fair. “The influence of HCl on the oxidation-enhanced diffusion of boron and arsenic in silicon.” Journal of Applied Physics 61, no. 10 (December 1, 1987): 4804–7. https://doi.org/10.1063/1.338342.Full Text
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SUBRAHMANYAN, R., H. Z. MASSOUD, and R. B. FAIR. “MEASUREMENT OF TWO-DIMENSIONAL DIFFUSION PROFILES.” Journal of the Electrochemical Society 134, no. 8B (August 1, 1987): C451–C451.Link to Item
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ROGERS, B., H. Z. MASSOUD, R. B. FAIR, U. M. GOSELE, R. SHAW, H. KORB, and M. GUSE. “POINT-DEFECT KINETICS DURING BACK SIDE OXIDATION MEASURED BY FRONT SIDE STACKING-FAULT GROWTH.” Journal of the Electrochemical Society 134, no. 3 (March 1, 1987): C125–C125.Link to Item
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SUBRAHMANYAN, R., H. Z. MASSOUD, and R. B. FAIR. “CHARACTERIZATION AND MODELING OF THE DIFFUSION OF BORON AND ARSENIC IN SI IN DRY O2/HCL MIXTURES.” Journal of the Electrochemical Society 134, no. 3 (March 1, 1987): C124–25.Link to Item
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Fair, R. B. “Reply to comments of F. F. Morehead.” Journal of Materials Research 2, no. 4 (January 1, 1987): 539–41. https://doi.org/10.1557/JMR.1987.0539.Full Text
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Fair, R. B. “PROCESS MODELS FOR ULTRA-SHALLOW JUNCTION TECHNOLOGIES.” Technical Digest International Electron Devices Meeting, January 1, 1987, 260–63. https://doi.org/10.1109/iedm.1987.191404.Full Text
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Morehead, F. F., and R. B. Fair. “Comment on `The diffusion of antimony in heavily doped and (sic) n- and p-type silicon' [J. Mater. Res. 1, 705 (1986)].” J. Mater. Res. (Usa) 2, no. 4 (1987): 538–41.
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Tsai, J. C. C., D. G. Schimmel, R. B. Fair, and W. Maszara. “Point Defect Generation during Phosphorus Diffusion in Silicon I. Concentrations above Solid Solubility.” Journal of the Electrochemical Society 134, no. 6 (January 1, 1987): 1508–18. https://doi.org/10.1149/1.2100701.Full Text
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Fair, R. B. “Modeling of dopant diffusion during rapid thermal annealing.” Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 4, no. 3 (January 1, 1986): 926–32. https://doi.org/10.1116/1.573758.Full Text
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Fair, R. B. “IMPURITY DIFFUSION DURING RTA.” Materials Research Society Symposia Proceedings 35 (December 1, 1985): 381–92.
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Manda, M. L., M. L. Shepard, R. B. Fair, and H. Z. Massoud. “STRESS-ASSISTED DIFFUSION OF BORON AND ARSENIC IN SILICON.” Materials Research Society Symposia Proceedings 36 (December 1, 1985): 71–76.
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Fair, R. B., and R. Subrahmanyan. “Predict - A new design tool for shallow junction processes.” Proceedings of Spie the International Society for Optical Engineering 530 (April 9, 1985): 88–96. https://doi.org/10.1117/12.946472.Full Text
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Fair, R. B. “OBSERVATIONS OF VACANCIES AND SELF-INTERSTITIALS IN DIFFUSION EXPERIMENTS IN SILICON.,” January 1, 1985, 173–85.
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Fair, R. B., R. C. Cook, and J. J. Wortman. “CURVE FITTING MODELS FOR BORON, PHOSPHORUS AND ARSENIC ION IMPLANTATIONS IN CRYSTALLINE SILICON.” Electrochemical Society Extended Abstracts 85–1 (January 1, 1985): 371–72.
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Liu, J., J. J. Wortman, and R. B. Fair. “IIB-6 Shallow p+-n Junction for CMOS VLSI Application Using Germanium Preamorphization.” Ieee Transactions on Electron Devices 32, no. 11 (January 1, 1985): 2533. https://doi.org/10.1109/T-ED.1985.22321.Full Text
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Wilson, W. B., H. Z. Massoud, E. J. Swanson, R. T. George, and R. B. Fair. “Measurement and Modeling of Charge Feedthrough in n-Channel MOS Analog Switches.” Ieee Journal of Solid State Circuits 20, no. 6 (January 1, 1985): 1206–13. https://doi.org/10.1109/JSSC.1985.1052460.Full Text
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Wilson, W. B., H. Z. Massoud, E. J. Swanson, R. T. G. Jr, and R. B. Fair. “MEASUREMENT AND MODELING OF CHARGE FEEDTHROUGH IN N-CHANNEL MOS ANALOG SWITCHES.” Ieee Journal of Solid State Circuits SC-20, no. 6 (1985): 1206–13.
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Rogers, B., R. B. Fair, W. Dyson, and G. A. Rozgony. “COMPUTER SIMULATION OF OXYGEN PRECIPITATION AND DENUDED ZONE FORMATION.” Electrochemical Society Extended Abstracts 84–1 (December 1, 1984): 54-54A.
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Rogers, B., R. B. Fair, W. Dyson, and G. A. Rozgonyi. “COMPUTER SIMULATION OF OXYGEN PRECIPITATION AND DENUDED ZONE FORMATION.” Proceedings the Electrochemical Society 84–7 (December 1, 1984): 74–84.
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Fair, R. B. “The role of vacancies and self-interstitials in impurity diffusion in silicon.” Diffus. Defect Data (Switzerland) 37 (1984): 1–24.
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Fair, R. B., J. J. Wortman, J. Liu, M. Tischler, and N. A. Masnari. “MODELING PHYSICAL LIMITATIONS ON JUNCTION SCALING FOR CMOS.” Ieee Transactions on Electron Devices ED-31, no. 9 (1984): 1180–85.
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Fair, R. B., J. J. Wortman, N. A. Masnari, and J. L. Mike Tischler. “Modeling Physical Limitations on Junction Scaling for CMOS.” Ieee Transactions on Electron Devices 31, no. 9 (January 1, 1984): 1180–85. https://doi.org/10.1109/T-ED.1984.21685.Full Text
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Fair, R. B., J. J. Wortman, and J. Liu. “Modeling Rapid Thermal Diffusion of Arsenic and Boron in Silicon.” Journal of the Electrochemical Society 131, no. 10 (January 1, 1984): 2387–94. https://doi.org/10.1149/1.2115263.Full Text
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Fair, R. B. “The effects of impurity diffusion and surface damage on oxygen precipitation in silicon.” Journal of Applied Physics 54, no. 1 (December 1, 1983): 388–91. https://doi.org/10.1063/1.331714.Full Text
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Fair, R. B. “MCNC - A NEW MULTI-INSTITUTIONAL THRUST IN MANUFACTURING TECHNOLOGY RESEARCH.,” December 1, 1983, 10–12.
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Fair, R. B., and W. G. Meyer. “MODELING ANOMALOUS JUNCTION FORMATION IN SILICON BY THE CODIFFUSION OF IMPLANTED ARSENIC WITH PHOSPHORUS.” Astm Special Technical Publication, December 1, 1983, 290–305.
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Bell, T. E., T. Moto oka, M. A. Fischetti, R. S. Cooper, R. E. Kahn, E. Bloch, J. D. Meindl, R. B. Fair, B. W. Oakley, and H. Nasko. “The teams and the players [fifth-generation computers].” Ieee Spectr. (Usa) 20, no. 11 (1983): 45–72.
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FAIR, R. B. “MCNC - ORGANIZING RESEARCH ON THE STATE LEVEL.” Ieee Spectrum 20, no. 11 (January 1, 1983): 58-+.Link to Item
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Fair, R. B. “MODELING OF DOPANT DIFFUSION AND ASSOCIATED EFFECTS IN SILICON.” Materials Research Society Symposia Proceedings 14 (January 1, 1983): 61–74.
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Fair, R. B., J. J. Wortman, J. Liu, M. Tischler, N. A. Masnari, and K. Y. Duh. “IIIB-8 Modeling Physical Limitations on Junction Scaling for CMOS.” Ieee Transactions on Electron Devices 30, no. 11 (January 1, 1983): 1584–85. https://doi.org/10.1109/T-ED.1983.21370.Full Text
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Fair, R. B., J. J. Wortman, and J. Liu. “MODELING RAPID THERMAL ANNEALING PROCESSES FOR SHALLOW JUNCTION FORMATION IN SILICON.” Technical Digest International Electron Devices Meeting, January 1, 1983, 658–61. https://doi.org/10.1109/iedm.1983.190593.Full Text
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Meyer, W. G., and R. B. Fair. “Dynamic Behavior of the Buildup of Fixed Charge and Interface States During Hot-Carrier Injection in Encapsulated MOSFET's.” Ieee Transactions on Electron Devices 30, no. 2 (January 1, 1983): 96–103. https://doi.org/10.1109/T-ED.1983.21081.Full Text
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Meyer, W. G., and R. B. Fair. “DYNAMIC BEHAVIOR OF THE BUILDUP OF FIXED CHARGE AND INTERFACE STATES DURING HOT-CARRIER INJECTION IN ENCAPSULATED MOSFET's.” Ieee Transactions on Electron Devices ED-30, no. 2 (1983): 96–103.
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FAIR, R. B., and A. CARIM. “ON THE DOPING DEPENDENCE OF OXIDATION-INDUCED STACKING FAULT SHRINKAGE IN SILICON.” J Electrochem Soc V 129, no. N 10 (1982): 2319–21.
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Fair, R. B. “SILICON PROCESS BALANCING ACT FOR VLSI.” Solid State Technology 25, no. 4 (January 1, 1982): 220–26.
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Fair, R. B., and A. Carim. “On the Doping Dependence of Oxidation-Induced Stacking Fault Shrinkage in Silicon.” Journal of the Electrochemical Society 129, no. 10 (January 1, 1982): 2319–21. https://doi.org/10.1149/1.2123502.Full Text
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Fair, R. B. “MODELING ANOMALOUS PHENOMENA IN ARSENIC DIFFUSION IN SILICON.” Proceedings the Electrochemical Society 81–5 (December 1, 1981): 963–78.
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Fair, R. B. “Oxidation, Impurity Diffusion, and Defect Growth in Silicon—An Overview.” Journal of the Electrochemical Society 128, no. 6 (January 1, 1981): 1360–68. https://doi.org/10.1149/1.2127636.Full Text
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Fair, R. B. “Molecular transport and diffusion in solids.” Sensors and Actuators 1, no. C (1981): 305–28.
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Fair, R. B., and R. C. Sun. “Threshold-Voltage Instability in MOSFET's Due to Channel Hot-Hole Emission.” Ieee Transactions on Electron Devices 28, no. 1 (January 1, 1981): 83–94. https://doi.org/10.1109/T-ED.1981.20287.Full Text
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Fair, R. B., and R. C. Sun. “THRESHOLD-VOLTAGE INSTABILITY IN MOSFET's DUE TO CHANNEL HOT-HOLE EMISSION.” Ieee Transactions on Electron Devices ED-28, no. 1 (1981): 83–94.
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Fair, R. B. “Molecular transport and diffusion in solids.” Sens. Actuators (Switzerland) 1, no. 3 (1981): 305–28. https://doi.org/10.1016/0250-6874(81)80013-3.Full Text Link to Item
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Fair, R. B. “On the role of self-interstitials in impurity diffusion in silicon.” Journal of Applied Physics 51, no. 11 (December 1, 1980): 5828–32. https://doi.org/10.1063/1.327540.Full Text
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Fair, R. B., and R. C. Sun. “THRESHOLD VOLTAGE INSTABILITY IN MOSFET's DUE TO CHANNEL HOT HOLE EMISSION.” Technical Digest International Electron Devices Meeting, January 1, 1980, 746–49. https://doi.org/10.1109/iedm.1980.189944.Full Text
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Fair, R. B. “Modeling laser-induced diffusion of implanted arsenic in silicon.” Journal of Applied Physics 50, no. 10 (December 1, 1979): 6552–55. https://doi.org/10.1063/1.325716.Full Text
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Fair, R. B. “The effect of strain-induced band-gap narrowing on high concentration phosphorus diffusion in silicon.” Journal of Applied Physics 50, no. 2 (December 1, 1979): 860–68. https://doi.org/10.1063/1.326001.Full Text
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Fair, R. B. “EFFECT OF STRAIN-INDUCED BAND-GAP NARROWING ON E-CENTRE CONCENTRATIONS IN Si.” Institute of Physics Conference Series, no. 46 (December 1, 1979).
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Fair, R. B. “Quantified Conditions for Emitter-Misfit Dislocation Formation in Silicon.” Journal of the Electrochemical Society 125, no. 6 (January 1, 1978): 923–26. https://doi.org/10.1149/1.2131592.Full Text
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Fair, R. B. “Analysis of Phosphorus-Diffused Layers in Silicon.” Journal of the Electrochemical Society 125, no. 2 (January 1, 1978): 323–27. https://doi.org/10.1149/1.2131438.Full Text
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Fair, R. B., and J. C. C. Tsai. “Quantitative Model for the Diffusion of Phosphorus in Silicon and the Emitter.” Journal of the Electrochemical Society 125, no. 6 (January 1, 1978): 997–98. https://doi.org/10.1149/1.2131609.Full Text
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Fair, R. B., and J. C. C. Tsai. “A Quantitative Model for the Diffusion of Phosphorus in Silicon and the Emitter Dip Effect.” Journal of the Electrochemical Society 125, no. 6 (January 1, 1978): 995–97. https://doi.org/10.1149/1.2131608.Full Text
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Fair, R. B., and J. C. C. Tsai. “Theory and direct measurement of boron segregation in SiO2 during dry, near dry, and wet O2 oxidation.” J. Electrochem. Soc. (Usa) 25, no. 12 (1978): 2050–58.
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Fair, R. B., and J. C. C. Tsai. “Theory and Direct Measurement of Boron Segregation in SiO2 during Dry, Near Dry, and Wet O2 Oxidation.” Journal of the Electrochemical Society 125, no. 12 (January 1, 1978): 2050–58. https://doi.org/10.1149/1.2131361.Full Text
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Fair, R. B., and J. C. C. Tsai. “A Quantitative Model for the Diffusion of Phosphorus in Silicon and the Emitter Dip Effect.” Journal of the Electrochemical Society 124, no. 7 (January 1, 1977): 1107–18. https://doi.org/10.1149/1.2133492.Full Text
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Fair, R. B. “Transistor design considerations for low-noise preamplifiers.” Ieee Transactions on Nuclear Science 23, no. 1 (January 1, 1976): 217–25. https://doi.org/10.1109/TNS.1976.4328242.Full Text
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Fair, R. B. “Transistor design considerations for low-noise preamplifiers.” Ieee Trans. Nucl. Sci. (Usa) ns-23, no. 1 (1976): 218–25.
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Fair, R. B., and H. W. Wivell. “Zener and Avalanche Breakdown in As-Implanted Low-Voltage Si n-p Junctions.” Ieee Transactions on Electron Devices 23, no. 5 (January 1, 1976): 512–18. https://doi.org/10.1109/T-ED.1976.18438.Full Text
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Fair, R. B., and H. W. Wivell. “ZENER AND AVALANCHE BREAKDOWN IN As-IMPLANTED LOW-VOLTAGE Si n-p JUNCTIONS.” Ieee Transactions on Electron Devices ED-23, no. 5 (1976): 512–18.
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Fair, R. B., and J. C. C. Tsai. “Profile parameters of implanted-diffused arsenic layers in silicon.” J. Electrochem. Soc. (Usa) 123, no. 4 (1976): 583–86.
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Fair, R. B. “Boron Diffusion in Silicon-Concentration and Orientation Dependence, Background Effects, and Profile Estimation.” Journal of the Electrochemical Society 122, no. 6 (January 1, 1975): 800–805. https://doi.org/10.1149/1.2134326.Full Text
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Fair, R. B., and H. W. Wivell. “ZENER AND AVALANCHE BREAKDOWN IN As-IMPLANTED, LOW-VOLTAGE Si N-P JUNCTIONS.,” January 1, 1975, 455–58. https://doi.org/10.1109/iedm.1975.188921.Full Text
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Fair, R. B., and J. C. C. Tsai. “The Diffusion of Ion-Implanted Arsenic in Silicon.” Journal of the Electrochemical Society 122, no. 12 (January 1, 1975): 1689–96. https://doi.org/10.1149/1.2134111.Full Text
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Fair, R. B., and P. N. Pappas. “Diffusion of Ion-Implanted B in High Concentration P- and As-Doped Silicon.” Journal of the Electrochemical Society 122, no. 9 (January 1, 1975): 1241–44. https://doi.org/10.1149/1.2134434.Full Text
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Fair, R. B., and P. N. Pappas. “The gettering of boron by an ion-implanted antimony layer in silicon.” Solid State Electronics 18, no. 12 (January 1, 1975): 1131–34. https://doi.org/10.1016/0038-1101(75)90179-3.Full Text
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Fair, R. B. “Cooperative effects between arsenic and boron in silicon during simultaneous diffusions from ion implanted and chemical source predepositions.” Solid State Electronics 17, no. 1 (January 1, 1974): 17–24. https://doi.org/10.1016/0038-1101(74)90108-7.Full Text
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Fair, R. B. “Graphical Design and Iterative Analysis of the DC Parameters of GaAs FET's.” Ieee Transactions on Electron Devices 21, no. 6 (January 1, 1974): 357–62. https://doi.org/10.1109/T-ED.1974.17928.Full Text
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Fair, R. B. “Explanation of anomalous base regions in transistors.” Applied Physics Letters 22, no. 4 (December 1, 1973): 186–87. https://doi.org/10.1063/1.1654604.Full Text
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Fair, R. B. “Quantitative theory of retarded base diffusion in silicon n-p-n structures with arsenic emitters.” Journal of Applied Physics 44, no. 1 (December 1, 1973): 283–91. https://doi.org/10.1063/1.1661875.Full Text
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Fair, R. B. “Erratum: Profile estimation of high-concentration arsenic diffusion in silicon (Journal of Applied Physics (1972) 43, (1278)).” Journal of Applied Physics 44, no. 1 (December 1, 1973): 536. https://doi.org/10.1063/1.1661938.Full Text
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Fair, R. B., and G. R. Weber. “Relationship between resistivity and total arsenic concentration in heavily doped n - And p -type silicon.” Journal of Applied Physics 44, no. 1 (December 1, 1973): 280–82. https://doi.org/10.1063/1.1661874.Full Text
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Fair, R. B., and G. R. Weber. “Effect of complex formation on diffusion of arsenic in silicon.” Journal of Applied Physics 44, no. 1 (December 1, 1973): 273–79. https://doi.org/10.1063/1.1661873.Full Text
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“Correction of calculated vacancy diffusion length at 1000°C in silicon.” Journal of Applied Physics 44, no. 8 (December 1, 1973): 3794–95. https://doi.org/10.1063/1.1662847.Full Text
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Fair, R. B. “Correction to “Optimum Low-Level Injection Efficiency of Silicon Transistors with Shallow Arsenic Emitters”.” Ieee Transactions on Electron Devices 20, no. 12 (January 1, 1973): 1169. https://doi.org/10.1109/T-ED.1973.17816.Full Text
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Fair, R. B. “OPtimum Low-Level Injection Efficiency of Silicon Transistors with Shallow Arsenic Emitters.” Ieee Transactions on Electron Devices 20, no. 7 (January 1, 1973): 642–47. https://doi.org/10.1109/T-ED.1973.17716.Full Text
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Fair, R. B. “Optimum low-level injection efficiency of silicon transistors with shallow arsenic emitters.” Ieee Trans. Electron Devices (Usa) ED20, no. 7 (1973): 642–47.
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Fair, R. B. “OPTIMUM LOW-LEVEL INJECTION EFFICIENCY OF SILICON TRANSISTORS WITH SHALLOW ARSENIC EMITTERS.” Ieee Transactions on Electron Devices ED-20, no. 7 (1973): 642–47.
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Fair, R. B. “Profile estimation of high-concentration arsenic diffusions in silicon.” Journal of Applied Physics 43, no. 3 (December 1, 1972): 1278–80. https://doi.org/10.1063/1.1661253.Full Text
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Fair, R. B. “Harmonic Distortion in the Junction Fieldeffect Transistor with Field-Dependent Mobility.” Ieee Transactions on Electron Devices 19, no. 1 (January 1, 1972): 9–13. https://doi.org/10.1109/T-ED.1972.17364.Full Text
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Fair, R. B. “HIGH CONCENTRATION ARSENIC DIFFUSION IN SILICON FROM A DOPED OXIDE SOURCE.” Journal of the Electrochemical Society 119, no. 10 (January 1, 1972): 1389–94. https://doi.org/10.1149/1.2404003.Full Text
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Fair, R. B. “Harmonic distortion in the junction field-effect transistor with field-dependent mobility.” Ieee Trans. Electron Devices (Usa) ED-19, no. 1 (1972): 9–13.
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Fair, R. B. “A wide slit scanning method for measuring electron and ion beam profiles.” Journal of Physics E: Scientific Instruments 4, no. 1 (December 1, 1971): 35–36. https://doi.org/10.1088/0022-3735/4/1/008.Full Text
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Fair, R. B. “Analysis and design of ion-beam deposition apparatus.” Journal of Applied Physics 42, no. 8 (December 1, 1971): 3176–81. https://doi.org/10.1063/1.1660703.Full Text
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Fair, R. B. “A self-consistent method for estimating non-step junction doping profiles from capacitance-voltage measurements.” J. Electrochem. Soc. (Usa) 118, no. 6 (1971): 971–75.
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El-Kareh, A., R. Fair, and C. Marsh. “Electron-beams with a dual purpose.” Vacuum 16, no. 6 (January 1, 1966): 315. https://doi.org/10.1016/0042-207x(66)93013-2.Full Text
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Fair, R. B., M. L. Manda, and J. J. Wortman. “The diffusion of antimony in heavily doped and n- and p-type silicon.” J. Mater. Res. (Usa) 1, no. 5 (n.d.): 705–11.
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Book Sections
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Fair, R. B. “The role of vacancies and self-interstitials in impurity diffusion in silicon.” In Materials Science Forum, 1:109–31, 1984. https://doi.org/10.4028/www.scientific.net/MSF.1.109.Full Text
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Conference Papers
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Bigdeli, Y., S. Preetam, K. C. Scott, Z. Zhong, T. C. Liang, Z. Tini, K. Chakrabarty, and R. B. Fair. “Enhanced fluorescent detection of nucleosomes using functionalized magnetic beads on a digital microfluidic device.” In Progress in Biomedical Optics and Imaging Proceedings of Spie, Vol. 11955, 2022. https://doi.org/10.1117/12.2620556.Full Text
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Bigdeli, Y., S. Preetam, K. C. Scott, Z. Zhong, T. C. Liang, K. Chakrabarty, and R. B. Fair. “Fluorescent detection of nucleosomes using functionalized magnetic beads on a digital microfluidic device.” In Progress in Biomedical Optics and Imaging Proceedings of Spie, Vol. 11637, 2021. https://doi.org/10.1117/12.2578339.Full Text
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Preetam, S., Y. Bigdeli, and R. B. Fair. “ENHANCED BIOMOLECULAR BINDING TO BEADS ON A DIGITAL MICROFLUIDIC DEVICE.” In Microtas 2021 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 959–60, 2021.
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Liang, T. C., Z. Zhong, Y. Bigdeli, T. Y. Ho, K. Chakrabarty, and R. Fair. “Adaptive droplet routing in digital microfluidic biochips using deep reinforcement learning.” In 37th International Conference on Machine Learning, Icml 2020, PartF168147-8:6006–16, 2020.
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Hu, K., M. Ibrahim, L. Chen, Z. Li, K. Chakrabarty, and R. Fair. “Experimental demonstration of error recovery in an integrated cyberphysical digital-microfluidic platform.” In Ieee Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, Biocas 2015 Proceedings, 2015. https://doi.org/10.1109/BioCAS.2015.7348390.Full Text
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Chen, L., A. Madison, and R. B. Fair. “Intra-droplet magnetic bead manipulation integrated on a digital microfluidic chip.” In 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Microtas 2014, 1449–51, 2014.
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Ren, H., V. Srinivasan, and R. B. Fair. “Design and testing of an interpolating mixing architecture for electrowetting-based droplet-on-chip chemical dilution.” In Transducers 2003 12th International Conference on Solid State Sensors, Actuators and Microsystems, Digest of Technical Papers, 1:619–22, 2003. https://doi.org/10.1109/SENSOR.2003.1215549.Full Text
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Pamula, V. K., P. Y. Paik, J. Venkatraman, M. G. Pollack, and R. B. Fair. “Microfluidic electrowetting-based droplet mixing.” In 2001 Microelectromechanical Systems Conference, Mems 2001, 8–10, 2002. https://doi.org/10.1109/MEMSC.2001.992729.Full Text
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Ren, H., and R. B. Fair. “Micro/nano liter droplet formation and dispensing by capacitance metering and electrowetting actuation.” In Proceedings of the Ieee Conference on Nanotechnology, 2002-January:369–72, 2002. https://doi.org/10.1109/NANO.2002.1032267.Full Text
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Fair, R. B. “Boron penetration of thin polysilicon gates ultrathin gate dielectrics from B+ implantation and thermal processing.” In Ulsi Science and Technology / 1997, edited by H. Z. Massoud, H. Iwai, C. Claeys, and R. B. Fair, 1997:247–61. ELECTROCHEMICAL SOCIETY INC, 1997.Link to Item
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Fair, R. B. “Rapid thermal annealing issues in silicon processing.” In Transient Thermal Processing Techniques in Electronic Materials, edited by N. M. Ravindra and R. K. Singh, 61–66. MINERALS, METALS & MATERIALS SOC, 1996.Link to Item
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Fair, R. B. “Boron diffusion in ultrathin silicon dioxide layers.” In Physics and Chemistry of Sio(2) and the Si Sio(2) Interface 3, 1996, edited by H. Z. Massoud, E. H. Poindexter, and C. R. Helms, 96:200–213. ELECTROCHEMICAL SOCIETY INC, 1996.Link to Item
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Fair, R. B., and W. Richards. “Process simulation of dopant atom diffusion in SiO2.” In Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology, edited by G. R. Srinivasan, C. S. Murthy, and S. T. Dunham, 96:179–94. ELECTROCHEMICAL SOCIETY INC, 1996.Link to Item
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FAIR, R. B. “TRANSIENT DIFFUSION IN SILICON - MODELS AND CURES.” In Journal of Electronic Materials, 19:34–34. MINERALS METALS MATERIALS SOC, 1990.Link to Item
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ROGERS, B., R. B. FAIR, W. DYSON, and G. A. ROZGONYI. “COMPUTER-SIMULATION OF OXYGEN PRECIPITATION AND DENUDED ZONE FORMATION IN CZOCHRALSKI SILICON.” In Journal of the Electrochemical Society, 131:C83–C83. ELECTROCHEMICAL SOC INC, 1984.Link to Item
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Fair, R. B. “EFFECT OF STRAIN-INDUCED BAND-GAP NARROWING ON E-CENTRE CONCENTRATIONS IN Si.” In Institute of Physics Conference Series, 1979.
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- Teaching & Mentoring
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Recent Courses
- ECE 331L: Fundamentals of Microelectronic Circuits 2023
- ECE 528: Integrated Circuit Engineering 2023
- ECE 331L: Fundamentals of Microelectronic Circuits 2022
- ECE 493: Projects in Electrical and Computer Engineering 2022
- ECE 533: Biochip Engineering 2022
- ECE 331L: Fundamentals of Microelectronic Circuits 2021
- ECE 528: Integrated Circuit Engineering 2021
- ECE 891: Internship 2021
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Advising & Mentoring
- I have provided mentoring to junior faculty in MPN systems. A key approach is to write joint proposals in which the junior person assumes the role of PI. I also co-author papers with junior faculty and provide guidance on technical approaches and ways of securing funding.
Available to mentor:
- Faculty
- Scholarly, Clinical, & Service Activities
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Outreach & Engaged Scholarship
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Service to the Profession
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