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Theory and direct measurement of boron segregation in SiO2 during dry, near dry, and wet O2 oxidation

Publication ,  Journal Article
Fair, RB; Tsai, JCC
Published in: J. Electrochem. Soc. (USA)
1978

A theory of B segregation is developed which accounts for the differences in m observed in, for example, diffusion from a highly doped B2O3 source as compared to oxidation of B-doped Si in wet and dry oxidizing ambients. Most dry O2 oxidations are really only partially dry and the presence of as little as ~20 ppm H2O results in an m essentially the same as oxidation in 100% steam, i.e., m=0.58 at 1200°C with an `effective' activation energy of 0.64 eV. However, in a truly dry oxidation, the B segregation coefficient at 1200°C is ~1 with an effective activation energy of 0.33 eV. It is proposed that these differences as well as the m>2 observed in high concentration B2O3 diffusion source oxidations are determined by the formation thermodynamics of the B compounds created during segregation. Quantitative agreement with m values obtained from directly measured B distributions across the SiO2/Si interface are obtained

Duke Scholars

Published In

J. Electrochem. Soc. (USA)

Publication Date

1978

Volume

25

Issue

12

Start / End Page

2050 / 2058
 

Citation

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Fair, R. B., & Tsai, J. C. C. (1978). Theory and direct measurement of boron segregation in SiO2 during dry, near dry, and wet O2 oxidation. J. Electrochem. Soc. (USA), 25(12), 2050–2058.
Fair, R. B., and J. C. C. Tsai. “Theory and direct measurement of boron segregation in SiO2 during dry, near dry, and wet O2 oxidation.” J. Electrochem. Soc. (USA) 25, no. 12 (1978): 2050–58.
Fair, R. B., and J. C. C. Tsai. “Theory and direct measurement of boron segregation in SiO2 during dry, near dry, and wet O2 oxidation.” J. Electrochem. Soc. (USA), vol. 25, no. 12, 1978, pp. 2050–58.
Fair RB, Tsai JCC. Theory and direct measurement of boron segregation in SiO2 during dry, near dry, and wet O2 oxidation. J Electrochem Soc (USA). 1978;25(12):2050–2058.

Published In

J. Electrochem. Soc. (USA)

Publication Date

1978

Volume

25

Issue

12

Start / End Page

2050 / 2058