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Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone

Publication ,  Journal Article
Liu, J; Martin, DT; Kadirvel, K; Nishida, T; Catafesta, LN; Sheplak, M; Mann, BP
Published in: Journal of Microelectromechanical Systems
2008

Duke Scholars

Published In

Journal of Microelectromechanical Systems

Publication Date

2008

Volume

117

Issue

3

Start / End Page

1358 / 1370

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 0913 Mechanical Engineering
  • 0910 Manufacturing Engineering
  • 0906 Electrical and Electronic Engineering
 

Citation

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Liu, J., Martin, D. T., Kadirvel, K., Nishida, T., Catafesta, L. N., Sheplak, M., & Mann, B. P. (2008). Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone. Journal of Microelectromechanical Systems, 117(3), 1358–1370.
Liu, J., D. T. Martin, K. Kadirvel, T. Nishida, L. N. Catafesta, M. Sheplak, and B. P. Mann. “Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone.” Journal of Microelectromechanical Systems 117, no. 3 (2008): 1358–70.
Liu J, Martin DT, Kadirvel K, Nishida T, Catafesta LN, Sheplak M, et al. Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone. Journal of Microelectromechanical Systems. 2008;117(3):1358–70.
Liu, J., et al. “Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone.” Journal of Microelectromechanical Systems, vol. 117, no. 3, 2008, pp. 1358–70.
Liu J, Martin DT, Kadirvel K, Nishida T, Catafesta LN, Sheplak M, Mann BP. Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone. Journal of Microelectromechanical Systems. 2008;117(3):1358–1370.

Published In

Journal of Microelectromechanical Systems

Publication Date

2008

Volume

117

Issue

3

Start / End Page

1358 / 1370

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 0913 Mechanical Engineering
  • 0910 Manufacturing Engineering
  • 0906 Electrical and Electronic Engineering