Scholars@Duke publication: Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone

Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone

Publication , Journal Article

Liu, J; Martin, DT; Kadirvel, K; Nishida, T; Catafesta, LN; Sheplak, M; Mann, BP

Published in: Journal of Microelectromechanical Systems

2008

Journal of Microelectromechanical Systems

2008

117

1358 / 1370

APA

Chicago

ICMJE

MLA

NLM

Liu, J., Martin, D. T., Kadirvel, K., Nishida, T., Catafesta, L. N., Sheplak, M., & Mann, B. P. (2008). Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone. Journal of Microelectromechanical Systems, 117(3), 1358–1370.

Liu, J., D. T. Martin, K. Kadirvel, T. Nishida, L. N. Catafesta, M. Sheplak, and B. P. Mann. “Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone.” Journal of Microelectromechanical Systems 117, no. 3 (2008): 1358–70.

Liu J, Martin DT, Kadirvel K, Nishida T, Catafesta LN, Sheplak M, et al. Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone. Journal of Microelectromechanical Systems. 2008;117(3):1358–70.

Liu, J., et al. “Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone.” Journal of Microelectromechanical Systems, vol. 117, no. 3, 2008, pp. 1358–70.

Liu J, Martin DT, Kadirvel K, Nishida T, Catafesta LN, Sheplak M, Mann BP. Harmonic balance nonlinear identification from steady state response of a dual backplate MEMS microphone. Journal of Microelectromechanical Systems. 2008;117(3):1358–1370.

Journal of Microelectromechanical Systems

2008

117

1358 / 1370