Behavior of hydrogen in InN investigated in real time exploiting spectroscopic ellipsometry
Publication
, Journal Article
Losurdo, M; Giangregorio, MM; Bruno, G; Kim, TH; Choi, S; Brown, AS; Pettinari, G; Capizzi, M; Polimeni, A
Published in: Applied Physics Letters
August 2007
The interaction of hydrogen with InN epitaxial films has been investigated by exposing InN to a remote hydrogen plasma and monitoring changes in the InN optical properties in real time via spectroscopic ellipsometry. Atomic hydrogen reacts swith InN causing nitrogen depletion with formation of indium clusters at the sample surface. After terminating the hydrogenation process, the hydrogen remains stable in the InN host lattice at T $
Duke Scholars
Published In
Applied Physics Letters
ISSN
0003-6951
Publication Date
August 2007
Volume
91
Issue
8
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences
Citation
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Losurdo, M., Giangregorio, M. M., Bruno, G., Kim, T. H., Choi, S., Brown, A. S., … Polimeni, A. (2007). Behavior of hydrogen in InN investigated in real time exploiting spectroscopic ellipsometry. Applied Physics Letters, 91(8).
Losurdo, M., M. M. Giangregorio, G. Bruno, T. H. Kim, S. Choi, A. S. Brown, G. Pettinari, M. Capizzi, and A. Polimeni. “Behavior of hydrogen in InN investigated in real time exploiting spectroscopic ellipsometry.” Applied Physics Letters 91, no. 8 (August 2007).
Losurdo M, Giangregorio MM, Bruno G, Kim TH, Choi S, Brown AS, et al. Behavior of hydrogen in InN investigated in real time exploiting spectroscopic ellipsometry. Applied Physics Letters. 2007 Aug;91(8).
Losurdo, M., et al. “Behavior of hydrogen in InN investigated in real time exploiting spectroscopic ellipsometry.” Applied Physics Letters, vol. 91, no. 8, Aug. 2007.
Losurdo M, Giangregorio MM, Bruno G, Kim TH, Choi S, Brown AS, Pettinari G, Capizzi M, Polimeni A. Behavior of hydrogen in InN investigated in real time exploiting spectroscopic ellipsometry. Applied Physics Letters. 2007 Aug;91(8).
Published In
Applied Physics Letters
ISSN
0003-6951
Publication Date
August 2007
Volume
91
Issue
8
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences