Lateral compositional modulation in lattice-matched GaInP/GaAs heterostructures
High-resolution transmission electron microscopy has been employed to study the microstructure of GaAs lattice-matched GaInP heterostructures grown by solid source molecular beam epitaxy. It is found that the GaInP epilayers undergo lateral compositional modulation at a growth temperature of 520 °C. The modulating spacing is irregular, varying between 5.0-15.0 nm. The compositional difference in the two decomposed phases is estimated between 0.14-2.1 at.%, which is far from thermal equilibrium. High-resolution TEM observation shows that, corresponding to the contrast modulation, there exist considerable lattice distortions nearly parallel to the growth direction inside the GaInP epilayers. In the distorted regions, dislocations of 60°-type are frequently observed. Factors that may contribute to the compositional modulation are discussed.
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- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 34 Chemical sciences
- 1099 Other Technology
- 0906 Electrical and Electronic Engineering
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics
Citation
Published In
DOI
ISSN
Publication Date
Volume
Issue
Start / End Page
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 34 Chemical sciences
- 1099 Other Technology
- 0906 Electrical and Electronic Engineering
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics