Study of the temperature-dependent interaction of 4H-SiC and 6H-SiC surfaces with atomic hydrogen
Publication
, Journal Article
Losurdo, M; Bruno, G; Brown, A; Kim, TH
Published in: Applied Physics Letters
May 17, 2004
The interactions of SiC surfaces with atomic hydrogen produced by a remote rf plasma source was investigated. Spectroscopic ellipsometry was used for the in situ monitoring of the low and high temperature impact on chemical and morphological surface modifications. The surface morphology was evaluated using Atomic Force Microscopy (AFM). The interactions with atomic hydrogen at 200° C resulted in an atomically flat and terraced surface with a roughness of 0.2 nm.
Duke Scholars
Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
May 17, 2004
Volume
84
Issue
20
Start / End Page
4011 / 4013
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences
Citation
APA
Chicago
ICMJE
MLA
NLM
Losurdo, M., Bruno, G., Brown, A., & Kim, T. H. (2004). Study of the temperature-dependent interaction of 4H-SiC and 6H-SiC surfaces with atomic hydrogen. Applied Physics Letters, 84(20), 4011–4013. https://doi.org/10.1063/1.1748845
Losurdo, M., G. Bruno, A. Brown, and T. H. Kim. “Study of the temperature-dependent interaction of 4H-SiC and 6H-SiC surfaces with atomic hydrogen.” Applied Physics Letters 84, no. 20 (May 17, 2004): 4011–13. https://doi.org/10.1063/1.1748845.
Losurdo M, Bruno G, Brown A, Kim TH. Study of the temperature-dependent interaction of 4H-SiC and 6H-SiC surfaces with atomic hydrogen. Applied Physics Letters. 2004 May 17;84(20):4011–3.
Losurdo, M., et al. “Study of the temperature-dependent interaction of 4H-SiC and 6H-SiC surfaces with atomic hydrogen.” Applied Physics Letters, vol. 84, no. 20, May 2004, pp. 4011–13. Scopus, doi:10.1063/1.1748845.
Losurdo M, Bruno G, Brown A, Kim TH. Study of the temperature-dependent interaction of 4H-SiC and 6H-SiC surfaces with atomic hydrogen. Applied Physics Letters. 2004 May 17;84(20):4011–4013.
Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
May 17, 2004
Volume
84
Issue
20
Start / End Page
4011 / 4013
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences