Scholars@Duke publication: Real-time monitoring of RHEED using machine vision techniques

Real-time monitoring of RHEED using machine vision techniques

Publication , Journal Article

Kromann, RF; Bicknell-Tassius, RN; Brown, AS; Dorsey, JF; Lee, K; May, G

Published in: Journal of Crystal Growth

January 1, 1997

A RHEED system has been developed that allows real-time monitoring of RHEED information throughout a multilayer growth run with rotation. The machine vision system consists of high-speed image capture hardware coupled with digital signal processing software that allows the real-time extraction/analysis of the RHEED intensity and width signals from the noise induced by substrate rotation. This system has been used to investigate the oxide desorption process on GaAs substrates, along with the specular spot intensity and width variation during the growth of a set of InGaAs/AlGaAs single quantum well structures with systematically varied process parameters. A strong correlation of the specular spot intensity with growth parameters has been observed. It is also shown that the observed specular spot intensity can be used to predict the quality of the InGaAs quantum well structures.

Duke Scholars

Author April S. Brown Electrical and Computer Engineering

Published In

Journal of Crystal Growth

DOI

10.1016/S0022-0248(96)01184-0

ISSN

0022-0248

Publication Date

January 1, 1997

Volume

175-176

Issue

PART 1

Start / End Page

334 / 339

Related Subject Headings

Applied Physics
4016 Materials engineering
3403 Macromolecular and materials chemistry
0912 Materials Engineering
0306 Physical Chemistry (incl. Structural)
0303 Macromolecular and Materials Chemistry

Citation

APA

Chicago

ICMJE

MLA

NLM

Kromann, R. F., Bicknell-Tassius, R. N., Brown, A. S., Dorsey, J. F., Lee, K., & May, G. (1997). Real-time monitoring of RHEED using machine vision techniques. Journal of Crystal Growth, 175–176(PART 1), 334–339. https://doi.org/10.1016/S0022-0248(96)01184-0

Kromann, R. F., R. N. Bicknell-Tassius, A. S. Brown, J. F. Dorsey, K. Lee, and G. May. “Real-time monitoring of RHEED using machine vision techniques.” Journal of Crystal Growth 175–176, no. PART 1 (January 1, 1997): 334–39. https://doi.org/10.1016/S0022-0248(96)01184-0.

Kromann RF, Bicknell-Tassius RN, Brown AS, Dorsey JF, Lee K, May G. Real-time monitoring of RHEED using machine vision techniques. Journal of Crystal Growth. 1997 Jan 1;175–176(PART 1):334–9.

Kromann, R. F., et al. “Real-time monitoring of RHEED using machine vision techniques.” Journal of Crystal Growth, vol. 175–176, no. PART 1, Jan. 1997, pp. 334–39. Scopus, doi:10.1016/S0022-0248(96)01184-0.

Kromann RF, Bicknell-Tassius RN, Brown AS, Dorsey JF, Lee K, May G. Real-time monitoring of RHEED using machine vision techniques. Journal of Crystal Growth. 1997 Jan 1;175–176(PART 1):334–339.

Published In

Journal of Crystal Growth

DOI

10.1016/S0022-0248(96)01184-0

ISSN

0022-0248

Publication Date

January 1, 1997

Volume

175-176

Issue

PART 1

Start / End Page

334 / 339

Related Subject Headings

Applied Physics
4016 Materials engineering
3403 Macromolecular and materials chemistry
0912 Materials Engineering
0306 Physical Chemistry (incl. Structural)
0303 Macromolecular and Materials Chemistry