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Compliant substrates for reduction of strain relief in mismatched overlayers

Publication ,  Journal Article
Carter-Coman, C; Bicknell-Tassius, R; Brown, AS; Jokerst, NM
Published in: Materials Research Society Symposium - Proceedings
January 1, 1997

Thin film compliant substrates can be used to extend the critical thickness in mismatched overlayers. A metastability model has been coupled with recent experimental strain relief data to determine the critical thickness of InGaAs epilayers grown on GaAs compliant substrates of variable thickness. The results of this model are also compared to other compliant substrate critical thickness models.

Duke Scholars

Published In

Materials Research Society Symposium - Proceedings

ISSN

0272-9172

Publication Date

January 1, 1997

Volume

441

Start / End Page

361 / 366
 

Citation

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Carter-Coman, C., Bicknell-Tassius, R., Brown, A. S., & Jokerst, N. M. (1997). Compliant substrates for reduction of strain relief in mismatched overlayers. Materials Research Society Symposium - Proceedings, 441, 361–366.
Carter-Coman, C., R. Bicknell-Tassius, A. S. Brown, and N. M. Jokerst. “Compliant substrates for reduction of strain relief in mismatched overlayers.” Materials Research Society Symposium - Proceedings 441 (January 1, 1997): 361–66.
Carter-Coman C, Bicknell-Tassius R, Brown AS, Jokerst NM. Compliant substrates for reduction of strain relief in mismatched overlayers. Materials Research Society Symposium - Proceedings. 1997 Jan 1;441:361–6.
Carter-Coman, C., et al. “Compliant substrates for reduction of strain relief in mismatched overlayers.” Materials Research Society Symposium - Proceedings, vol. 441, Jan. 1997, pp. 361–66.
Carter-Coman C, Bicknell-Tassius R, Brown AS, Jokerst NM. Compliant substrates for reduction of strain relief in mismatched overlayers. Materials Research Society Symposium - Proceedings. 1997 Jan 1;441:361–366.

Published In

Materials Research Society Symposium - Proceedings

ISSN

0272-9172

Publication Date

January 1, 1997

Volume

441

Start / End Page

361 / 366