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Chip scale optical microresonator sensors integrated with embedded thin film photodetectors on electrowetting digital microfluidics platforms

Publication ,  Journal Article
Luan, L; Royal, MW; Evans, R; Fair, RB; Jokerst, NM
Published in: IEEE Sensors Journal
May 8, 2012

Miniaturized, portable, sensitive, and low cost sensing systems are important for medical and environmental diagnostic and monitoring applications. Chip scale integrated photonic sensing systems that combine optical, electrical, and fluidic functions are especially attractive for sensing applications due to the high sensitivity of optical sensors, the small form-factor of chip scale systems, and the low-cost processing possible for systems fabricated with well-developed mass production techniques. In this paper, a chip scale sensing system, which is composed of a planar integrated optical microdisk resonator and a thin film InGaAs photodetector, is integrated with a digital microfluidic system. This system was designed, fabricated, and experimentally characterized by dispensing and moving droplets of glucose solution from the reservoir to the microresonator sensor. The optical output of the resonator was transduced by the integrated photodetector to an electrical current signal for readout. © 2001-2012 IEEE.

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Published In

IEEE Sensors Journal

DOI

ISSN

1530-437X

Publication Date

May 8, 2012

Volume

12

Issue

6

Start / End Page

1794 / 1800

Related Subject Headings

  • Analytical Chemistry
  • 40 Engineering
  • 0913 Mechanical Engineering
  • 0906 Electrical and Electronic Engineering
  • 0205 Optical Physics
 

Citation

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Luan, L., Royal, M. W., Evans, R., Fair, R. B., & Jokerst, N. M. (2012). Chip scale optical microresonator sensors integrated with embedded thin film photodetectors on electrowetting digital microfluidics platforms. IEEE Sensors Journal, 12(6), 1794–1800. https://doi.org/10.1109/JSEN.2011.2179027
Luan, L., M. W. Royal, R. Evans, R. B. Fair, and N. M. Jokerst. “Chip scale optical microresonator sensors integrated with embedded thin film photodetectors on electrowetting digital microfluidics platforms.” IEEE Sensors Journal 12, no. 6 (May 8, 2012): 1794–1800. https://doi.org/10.1109/JSEN.2011.2179027.
Luan L, Royal MW, Evans R, Fair RB, Jokerst NM. Chip scale optical microresonator sensors integrated with embedded thin film photodetectors on electrowetting digital microfluidics platforms. IEEE Sensors Journal. 2012 May 8;12(6):1794–800.
Luan, L., et al. “Chip scale optical microresonator sensors integrated with embedded thin film photodetectors on electrowetting digital microfluidics platforms.” IEEE Sensors Journal, vol. 12, no. 6, May 2012, pp. 1794–800. Scopus, doi:10.1109/JSEN.2011.2179027.
Luan L, Royal MW, Evans R, Fair RB, Jokerst NM. Chip scale optical microresonator sensors integrated with embedded thin film photodetectors on electrowetting digital microfluidics platforms. IEEE Sensors Journal. 2012 May 8;12(6):1794–1800.

Published In

IEEE Sensors Journal

DOI

ISSN

1530-437X

Publication Date

May 8, 2012

Volume

12

Issue

6

Start / End Page

1794 / 1800

Related Subject Headings

  • Analytical Chemistry
  • 40 Engineering
  • 0913 Mechanical Engineering
  • 0906 Electrical and Electronic Engineering
  • 0205 Optical Physics