Scalable macromodels for microelectromechanical systems
Publication
, Journal Article
Srinivasan, V; Jog, A; Fair, RB
Published in: 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001
December 1, 2001
A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under consideration. The entire methodology is implemented in a symbolic computation environment to preserve dependencies on physical device parameters. The macromodeling methodology is demonstrated using the combdrive microresonator as a representative example. The results are compared with analytical models, NODAS and finite element simulations.
Duke Scholars
Published In
2001 International Conference on Modeling and Simulation of Microsystems MSM 2001
Publication Date
December 1, 2001
Start / End Page
72 / 75
Citation
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Srinivasan, V., Jog, A., & Fair, R. B. (2001). Scalable macromodels for microelectromechanical systems. 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001, 72–75.
Srinivasan, V., A. Jog, and R. B. Fair. “Scalable macromodels for microelectromechanical systems.” 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001, December 1, 2001, 72–75.
Srinivasan V, Jog A, Fair RB. Scalable macromodels for microelectromechanical systems. 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001. 2001 Dec 1;72–5.
Srinivasan, V., et al. “Scalable macromodels for microelectromechanical systems.” 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001, Dec. 2001, pp. 72–75.
Srinivasan V, Jog A, Fair RB. Scalable macromodels for microelectromechanical systems. 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001. 2001 Dec 1;72–75.
Published In
2001 International Conference on Modeling and Simulation of Microsystems MSM 2001
Publication Date
December 1, 2001
Start / End Page
72 / 75