Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams
Publication
, Journal Article
Pamula, VK; Jog, A; Fair, RB
Published in: 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001
December 1, 2001
We describe a method for estimating the Young's modulus of thin-film gold deposited on the poly2 layer in the MUMPs process is described. An optical detection system employing position sensitive detectors (PSD) is built to measure the bimetallic (gold/poly2) cantilever deflection with increasing temperature. Measured cantilever deflections are compared to finite element simulations performed with MEMCAD™ which show an excellent match for a Young's modulus of 78GPa and a Poisson's ratio of 0.35.
Duke Scholars
Published In
2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001
Publication Date
December 1, 2001
Start / End Page
410 / 413
Citation
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Pamula, V. K., Jog, A., & Fair, R. B. (2001). Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams. 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001, 410–413.
Pamula, V. K., A. Jog, and R. B. Fair. “Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams.” 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001, December 1, 2001, 410–13.
Pamula VK, Jog A, Fair RB. Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams. 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001. 2001 Dec 1;410–3.
Pamula, V. K., et al. “Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams.” 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001, Dec. 2001, pp. 410–13.
Pamula VK, Jog A, Fair RB. Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams. 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001. 2001 Dec 1;410–413.
Published In
2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001
Publication Date
December 1, 2001
Start / End Page
410 / 413