Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams
Publication
, Journal Article
Pamula, VK; Jog, A; Fair, RB
Published in: 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001
December 1, 2001
We describe a method for estimating the Young's modulus of thin-film gold deposited on the poly2 layer in the MUMPs process is described. An optical detection system employing position sensitive detectors (PSD) is built to measure the bimetallic (gold/poly2) cantilever deflection with increasing temperature. Measured cantilever deflections are compared to finite element simulations performed with MEMCAD™ which show an excellent match for a Young's modulus of 78GPa and a Poisson's ratio of 0.35.
Duke Scholars
Published In
2001 International Conference on Modeling and Simulation of Microsystems MSM 2001
Publication Date
December 1, 2001
Start / End Page
410 / 413
Citation
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Pamula, V. K., Jog, A., & Fair, R. B. (2001). Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams. 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001, 410–413.
Pamula, V. K., A. Jog, and R. B. Fair. “Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams.” 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001, December 1, 2001, 410–13.
Pamula VK, Jog A, Fair RB. Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams. 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001. 2001 Dec 1;410–3.
Pamula, V. K., et al. “Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams.” 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001, Dec. 2001, pp. 410–13.
Pamula VK, Jog A, Fair RB. Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams. 2001 International Conference on Modeling and Simulation of Microsystems MSM 2001. 2001 Dec 1;410–413.
Published In
2001 International Conference on Modeling and Simulation of Microsystems MSM 2001
Publication Date
December 1, 2001
Start / End Page
410 / 413