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Microelectromechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner

Publication ,  Journal Article
Bobbio, SM; Smith, SW; Zara, J; Goodwin-Johansson, S; Hudak, J; DuBois, T; Leamy, H; Godwin, J; Pennington, M
Published in: Proceedings of SPIE - The International Society for Optical Engineering
December 1, 1999

A miniature ultrasound scanner has been constructed using a MEMS actuator called an Integrated Force Array (IFA). A second type of actuator called a Spiral Wound Transducer (SWT) is under development and shows significant promise for this application. Both the scanner and SWT will be discussed.

Duke Scholars

Published In

Proceedings of SPIE - The International Society for Optical Engineering

ISSN

0277-786X

Publication Date

December 1, 1999

Volume

3673

Start / End Page

210 / 218
 

Citation

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ICMJE
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Bobbio, S. M., Smith, S. W., Zara, J., Goodwin-Johansson, S., Hudak, J., DuBois, T., … Pennington, M. (1999). Microelectromechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner. Proceedings of SPIE - The International Society for Optical Engineering, 3673, 210–218.
Bobbio, S. M., S. W. Smith, J. Zara, S. Goodwin-Johansson, J. Hudak, T. DuBois, H. Leamy, J. Godwin, and M. Pennington. “Microelectromechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner.” Proceedings of SPIE - The International Society for Optical Engineering 3673 (December 1, 1999): 210–18.
Bobbio SM, Smith SW, Zara J, Goodwin-Johansson S, Hudak J, DuBois T, et al. Microelectromechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner. Proceedings of SPIE - The International Society for Optical Engineering. 1999 Dec 1;3673:210–8.
Bobbio, S. M., et al. “Microelectromechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner.” Proceedings of SPIE - The International Society for Optical Engineering, vol. 3673, Dec. 1999, pp. 210–18.
Bobbio SM, Smith SW, Zara J, Goodwin-Johansson S, Hudak J, DuBois T, Leamy H, Godwin J, Pennington M. Microelectromechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner. Proceedings of SPIE - The International Society for Optical Engineering. 1999 Dec 1;3673:210–218.

Published In

Proceedings of SPIE - The International Society for Optical Engineering

ISSN

0277-786X

Publication Date

December 1, 1999

Volume

3673

Start / End Page

210 / 218