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Grain enhancement of thin silicon layers using optical processing

Publication ,  Journal Article
Sopori, BL; Alleman, J; Chen, W; Tan, TY; Ravindra, NM
Published in: Materials Research Society Symposium - Proceedings
January 1, 1997

We describe a new technique for producing large-grain, poly-Si thin films on low-cost glass substrates for solar cell applications. A layer of fine-grain poly-Si is deposited on metal-coated substrate followed by a grain enhancement using optical/thermal annealing at low temperatures (approximately 500 °C). The results show that in thin-layer silicon, less than 3 microns, grains can be formed in a short time (few minutes) with grain sizes larger than the film thickness. The possible mechanisms involved in this process are also presented.

Duke Scholars

Published In

Materials Research Society Symposium - Proceedings

DOI

ISSN

0272-9172

Publication Date

January 1, 1997

Volume

470

Start / End Page

419 / 424
 

Citation

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Sopori, B. L., Alleman, J., Chen, W., Tan, T. Y., & Ravindra, N. M. (1997). Grain enhancement of thin silicon layers using optical processing. Materials Research Society Symposium - Proceedings, 470, 419–424. https://doi.org/10.1557/proc-470-419
Sopori, B. L., J. Alleman, W. Chen, T. Y. Tan, and N. M. Ravindra. “Grain enhancement of thin silicon layers using optical processing.” Materials Research Society Symposium - Proceedings 470 (January 1, 1997): 419–24. https://doi.org/10.1557/proc-470-419.
Sopori BL, Alleman J, Chen W, Tan TY, Ravindra NM. Grain enhancement of thin silicon layers using optical processing. Materials Research Society Symposium - Proceedings. 1997 Jan 1;470:419–24.
Sopori, B. L., et al. “Grain enhancement of thin silicon layers using optical processing.” Materials Research Society Symposium - Proceedings, vol. 470, Jan. 1997, pp. 419–24. Scopus, doi:10.1557/proc-470-419.
Sopori BL, Alleman J, Chen W, Tan TY, Ravindra NM. Grain enhancement of thin silicon layers using optical processing. Materials Research Society Symposium - Proceedings. 1997 Jan 1;470:419–424.

Published In

Materials Research Society Symposium - Proceedings

DOI

ISSN

0272-9172

Publication Date

January 1, 1997

Volume

470

Start / End Page

419 / 424