OBSERVATION OF OXIDATION-ENHANCED AND -RETARDED DIFFUSION OF ANTIMONY IN SILICON: THE BEHAVIOR OF (111) WAFERS.
Publication
, Journal Article
Tan, TY; Ginsberg, BJ
Published in: Materials Research Society Symposia Proceedings
January 1, 1983
Duke Scholars
Published In
Materials Research Society Symposia Proceedings
ISSN
0272-9172
Publication Date
January 1, 1983
Volume
14
Start / End Page
141 / 145
Citation
APA
Chicago
ICMJE
MLA
NLM
Tan, T. Y., & Ginsberg, B. J. (1983). OBSERVATION OF OXIDATION-ENHANCED AND -RETARDED DIFFUSION OF ANTIMONY IN SILICON: THE BEHAVIOR OF (111) WAFERS. Materials Research Society Symposia Proceedings, 14, 141–145.
Tan, T. Y., and B. J. Ginsberg. “OBSERVATION OF OXIDATION-ENHANCED AND -RETARDED DIFFUSION OF ANTIMONY IN SILICON: THE BEHAVIOR OF (111) WAFERS.” Materials Research Society Symposia Proceedings 14 (January 1, 1983): 141–45.
Tan TY, Ginsberg BJ. OBSERVATION OF OXIDATION-ENHANCED AND -RETARDED DIFFUSION OF ANTIMONY IN SILICON: THE BEHAVIOR OF (111) WAFERS. Materials Research Society Symposia Proceedings. 1983 Jan 1;14:141–5.
Tan, T. Y., and B. J. Ginsberg. “OBSERVATION OF OXIDATION-ENHANCED AND -RETARDED DIFFUSION OF ANTIMONY IN SILICON: THE BEHAVIOR OF (111) WAFERS.” Materials Research Society Symposia Proceedings, vol. 14, Jan. 1983, pp. 141–45.
Tan TY, Ginsberg BJ. OBSERVATION OF OXIDATION-ENHANCED AND -RETARDED DIFFUSION OF ANTIMONY IN SILICON: THE BEHAVIOR OF (111) WAFERS. Materials Research Society Symposia Proceedings. 1983 Jan 1;14:141–145.
Published In
Materials Research Society Symposia Proceedings
ISSN
0272-9172
Publication Date
January 1, 1983
Volume
14
Start / End Page
141 / 145