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COMPUTER-SIMULATION OF OXYGEN PRECIPITATION AND DENUDED ZONE FORMATION IN CZOCHRALSKI SILICON

Publication ,  Conference
ROGERS, B; FAIR, RB; DYSON, W; ROZGONYI, GA
Published in: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
January 1, 1984
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Duke Scholars

Richard B. Fair
Author Richard B. Fair Electrical and Computer Engineering

Published In

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

ISSN

0013-4651

Publication Date

January 1, 1984

Volume

131

Issue

3

Start / End Page

C83 / C83

Publisher

ELECTROCHEMICAL SOC INC

Related Subject Headings

  • Energy
  • 4016 Materials engineering
  • 3406 Physical chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry
 

Citation

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ROGERS, B., FAIR, R. B., DYSON, W., & ROZGONYI, G. A. (1984). COMPUTER-SIMULATION OF OXYGEN PRECIPITATION AND DENUDED ZONE FORMATION IN CZOCHRALSKI SILICON. In JOURNAL OF THE ELECTROCHEMICAL SOCIETY (Vol. 131, pp. C83–C83). ELECTROCHEMICAL SOC INC.
ROGERS, B., R. B. FAIR, W. DYSON, and G. A. ROZGONYI. “COMPUTER-SIMULATION OF OXYGEN PRECIPITATION AND DENUDED ZONE FORMATION IN CZOCHRALSKI SILICON.” In JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 131:C83–C83. ELECTROCHEMICAL SOC INC, 1984.
ROGERS B, FAIR RB, DYSON W, ROZGONYI GA. COMPUTER-SIMULATION OF OXYGEN PRECIPITATION AND DENUDED ZONE FORMATION IN CZOCHRALSKI SILICON. In: JOURNAL OF THE ELECTROCHEMICAL SOCIETY. ELECTROCHEMICAL SOC INC; 1984. p. C83–C83.
ROGERS, B., et al. “COMPUTER-SIMULATION OF OXYGEN PRECIPITATION AND DENUDED ZONE FORMATION IN CZOCHRALSKI SILICON.” JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 131, no. 3, ELECTROCHEMICAL SOC INC, 1984, pp. C83–C83.
ROGERS B, FAIR RB, DYSON W, ROZGONYI GA. COMPUTER-SIMULATION OF OXYGEN PRECIPITATION AND DENUDED ZONE FORMATION IN CZOCHRALSKI SILICON. JOURNAL OF THE ELECTROCHEMICAL SOCIETY. ELECTROCHEMICAL SOC INC; 1984. p. C83–C83.

Published In

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

ISSN

0013-4651

Publication Date

January 1, 1984

Volume

131

Issue

3

Start / End Page

C83 / C83

Publisher

ELECTROCHEMICAL SOC INC

Related Subject Headings

  • Energy
  • 4016 Materials engineering
  • 3406 Physical chemistry
  • 0912 Materials Engineering
  • 0306 Physical Chemistry (incl. Structural)
  • 0303 Macromolecular and Materials Chemistry