Boron penetration of thin polysilicon gates ultrathin gate dielectrics from B+ implantation and thermal processing
Publication
, Conference
Fair, RB
Published in: ULSI SCIENCE AND TECHNOLOGY / 1997
January 1, 1997
Duke Scholars
Published In
ULSI SCIENCE AND TECHNOLOGY / 1997
ISBN
1-56677-130-7
Publication Date
January 1, 1997
Volume
1997
Issue
3
Start / End Page
247 / 261
Location
MONTREAL, CANADA
Publisher
ELECTROCHEMICAL SOCIETY INC
Conference Name
6th International Symposium on Ultralarge-Scale Integration (LSI) Science and Technology
Citation
APA
Chicago
ICMJE
MLA
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Fair, R. B. (1997). Boron penetration of thin polysilicon gates ultrathin gate dielectrics from B+ implantation and thermal processing. In H. Z. Massoud, H. Iwai, C. Claeys, & R. B. Fair (Eds.), ULSI SCIENCE AND TECHNOLOGY / 1997 (Vol. 1997, pp. 247–261). MONTREAL, CANADA: ELECTROCHEMICAL SOCIETY INC.
Fair, R. B. “Boron penetration of thin polysilicon gates ultrathin gate dielectrics from B+ implantation and thermal processing.” In ULSI SCIENCE AND TECHNOLOGY / 1997, edited by H. Z. Massoud, H. Iwai, C. Claeys, and R. B. Fair, 1997:247–61. ELECTROCHEMICAL SOCIETY INC, 1997.
Fair RB. Boron penetration of thin polysilicon gates ultrathin gate dielectrics from B+ implantation and thermal processing. In: Massoud HZ, Iwai H, Claeys C, Fair RB, editors. ULSI SCIENCE AND TECHNOLOGY / 1997. ELECTROCHEMICAL SOCIETY INC; 1997. p. 247–61.
Fair, R. B. “Boron penetration of thin polysilicon gates ultrathin gate dielectrics from B+ implantation and thermal processing.” ULSI SCIENCE AND TECHNOLOGY / 1997, edited by H. Z. Massoud et al., vol. 1997, no. 3, ELECTROCHEMICAL SOCIETY INC, 1997, pp. 247–61.
Fair RB. Boron penetration of thin polysilicon gates ultrathin gate dielectrics from B+ implantation and thermal processing. In: Massoud HZ, Iwai H, Claeys C, Fair RB, editors. ULSI SCIENCE AND TECHNOLOGY / 1997. ELECTROCHEMICAL SOCIETY INC; 1997. p. 247–261.
Published In
ULSI SCIENCE AND TECHNOLOGY / 1997
ISBN
1-56677-130-7
Publication Date
January 1, 1997
Volume
1997
Issue
3
Start / End Page
247 / 261
Location
MONTREAL, CANADA
Publisher
ELECTROCHEMICAL SOCIETY INC
Conference Name
6th International Symposium on Ultralarge-Scale Integration (LSI) Science and Technology