Patterson, K., Vasek, J., Yuan, C. M., Bailey, G. E., Kusnadi, I., Do, T., & Sturtevant, J. L. (2007). Circuit-based SEM contour OPC model calibration. SPIE Proceedings. https://doi.org/10.1117/12.713044

Patterson, Kyle, Jim Vasek, Chi Min Yuan, George E. Bailey, Ir Kusnadi, Thuy Do, and John L. Sturtevant. “Circuit-based SEM contour OPC model calibration.” Edited by Alfred K. K. Wong and Vivek K. Singh. SPIE Proceedings, March 16, 2007. https://doi.org/10.1117/12.713044.

Patterson K, Vasek J, Yuan CM, Bailey GE, Kusnadi I, Do T, et al. Circuit-based SEM contour OPC model calibration. Wong AKK, Singh VK, editors. SPIE Proceedings. 2007 Mar 16;

Patterson, Kyle, et al. “Circuit-based SEM contour OPC model calibration.” SPIE Proceedings, edited by Alfred K. K. Wong and Vivek K. Singh, SPIE, Mar. 2007. Crossref, doi:10.1117/12.713044.

Patterson K, Vasek J, Yuan CM, Bailey GE, Kusnadi I, Do T, Sturtevant JL. Circuit-based SEM contour OPC model calibration. Wong AKK, Singh VK, editors. SPIE Proceedings. SPIE; 2007 Mar 16;