Patterson, K., Vasek, J., Yuan, C. M., Bailey, G. E., Kusnadi, I., Do, T., & Sturtevant, J. L. (2007). Circuit-based SEM contour OPC model calibration. SPIE Proceedings, 6521, 65211N-65211N. https://doi.org/10.1117/12.713044

Patterson, Kyle, Jim Vasek, Chi Min Yuan, George E. Bailey, Ir Kusnadi, Thuy Do, and John L. Sturtevant. “Circuit-based SEM contour OPC model calibration.” Edited by Alfred K. K. Wong and Vivek K. Singh. SPIE Proceedings 6521 (March 16, 2007): 65211N-65211N. https://doi.org/10.1117/12.713044.

Patterson K, Vasek J, Yuan CM, Bailey GE, Kusnadi I, Do T, et al. Circuit-based SEM contour OPC model calibration. Wong AKK, Singh VK, editors. SPIE Proceedings. 2007 Mar 16;6521:65211N-65211N.

Patterson, Kyle, et al. “Circuit-based SEM contour OPC model calibration.” SPIE Proceedings, edited by Alfred K. K. Wong and Vivek K. Singh, vol. 6521, SPIE, Mar. 2007, pp. 65211N-65211N. Crossref, doi:10.1117/12.713044.

Patterson K, Vasek J, Yuan CM, Bailey GE, Kusnadi I, Do T, Sturtevant JL. Circuit-based SEM contour OPC model calibration. Wong AKK, Singh VK, editors. SPIE Proceedings. SPIE; 2007 Mar 16;6521:65211N-65211N.