Publication
, Conference
Massoud, HZ; Sampson, RK; Conrad, KA; Hu, Y-Z; Irene, EA
Published in: MRS Proceedings
1991
MRS Proceedings
1946-4274
0272-9172
1991
224
Springer Science and Business Media LLC
APA
Chicago
ICMJE
MLA
NLM
Massoud, H. Z., Sampson, R. K., Conrad, K. A., Hu, Y.-Z., & Irene, E. A. (1991). Applications of In Situ Ellipsometry in RTP Temperature Measurement and Process Control. In MRS Proceedings (Vol. 224). Springer Science and Business Media LLC. https://doi.org/10.1557/proc-224-17
Massoud, Hisham Z., Ronald K. Sampson, Kevin A. Conrad, Yao-Zhi Hu, and Eugene A. Irene. “Applications of In Situ Ellipsometry in RTP Temperature Measurement and Process Control.” In MRS Proceedings, Vol. 224. Springer Science and Business Media LLC, 1991. https://doi.org/10.1557/proc-224-17.
Massoud HZ, Sampson RK, Conrad KA, Hu Y-Z, Irene EA. Applications of In Situ Ellipsometry in RTP Temperature Measurement and Process Control. In: MRS Proceedings. Springer Science and Business Media LLC; 1991.
Massoud, Hisham Z., et al. “Applications of In Situ Ellipsometry in RTP Temperature Measurement and Process Control.” MRS Proceedings, vol. 224, Springer Science and Business Media LLC, 1991. Crossref, doi:10.1557/proc-224-17.
Massoud HZ, Sampson RK, Conrad KA, Hu Y-Z, Irene EA. Applications of In Situ Ellipsometry in RTP Temperature Measurement and Process Control. MRS Proceedings. Springer Science and Business Media LLC; 1991.
MRS Proceedings
1946-4274
0272-9172
1991
224
Springer Science and Business Media LLC