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Vertical carbon nanotube devices with nanoscale lengths controlled without lithography

Publication ,  Journal Article
Franklin, AD; Sayer, RA; Sands, TD; Janes, DB; Fisher, TS
Published in: IEEE Transactions on Nanotechnology
July 1, 2009

Vertical single-walled carbon nanotubes (v-SWCNTs) are synthesized within highly ordered porous anodic alumina (PAA) templates supported on Si substrates. A process for obtaining thin-film PAA with long-range ordered nanopores is presented in this paper. Each nanopore contains at most one v-SWCNT that is supported by a dielectric and addressed by electrochemically formed Pd nanowire source contacts and evaporated Pd drain contacts. Characteristics of these completely vertical, two-terminal nanotube devices are presented. Control of the v-SWCNT length is demonstrated using a straightforward etching process with lengths of less than 100nm achieved without the need for complex/expensive lithography. This effective nanoscale length control of highly ordered v-SWCNTs provides a practical basis for the realization of CNT-based nanoelectronics. © 2006 IEEE.

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Published In

IEEE Transactions on Nanotechnology

DOI

ISSN

1536-125X

Publication Date

July 1, 2009

Volume

8

Issue

4

Start / End Page

469 / 476

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 1007 Nanotechnology
  • 0906 Electrical and Electronic Engineering
  • 0303 Macromolecular and Materials Chemistry
 

Citation

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Franklin, A. D., Sayer, R. A., Sands, T. D., Janes, D. B., & Fisher, T. S. (2009). Vertical carbon nanotube devices with nanoscale lengths controlled without lithography. IEEE Transactions on Nanotechnology, 8(4), 469–476. https://doi.org/10.1109/TNANO.2009.2012399
Franklin, A. D., R. A. Sayer, T. D. Sands, D. B. Janes, and T. S. Fisher. “Vertical carbon nanotube devices with nanoscale lengths controlled without lithography.” IEEE Transactions on Nanotechnology 8, no. 4 (July 1, 2009): 469–76. https://doi.org/10.1109/TNANO.2009.2012399.
Franklin AD, Sayer RA, Sands TD, Janes DB, Fisher TS. Vertical carbon nanotube devices with nanoscale lengths controlled without lithography. IEEE Transactions on Nanotechnology. 2009 Jul 1;8(4):469–76.
Franklin, A. D., et al. “Vertical carbon nanotube devices with nanoscale lengths controlled without lithography.” IEEE Transactions on Nanotechnology, vol. 8, no. 4, July 2009, pp. 469–76. Scopus, doi:10.1109/TNANO.2009.2012399.
Franklin AD, Sayer RA, Sands TD, Janes DB, Fisher TS. Vertical carbon nanotube devices with nanoscale lengths controlled without lithography. IEEE Transactions on Nanotechnology. 2009 Jul 1;8(4):469–476.

Published In

IEEE Transactions on Nanotechnology

DOI

ISSN

1536-125X

Publication Date

July 1, 2009

Volume

8

Issue

4

Start / End Page

469 / 476

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 1007 Nanotechnology
  • 0906 Electrical and Electronic Engineering
  • 0303 Macromolecular and Materials Chemistry