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In vivo real-time 3-D intracardiac echo using PMUT arrays.

Publication ,  Journal Article
Dausch, DE; Gilchrist, KH; Carlson, JB; Hall, SD; Castellucci, JB; von Ramm, OT
Published in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control
October 2014

Piezoelectric micromachined ultrasound transducer (PMUT) matrix arrays were fabricated containing novel through-silicon interconnects and integrated into intracardiac catheters for in vivo real-time 3-D imaging. PMUT arrays with rectangular apertures containing 256 and 512 active elements were fabricated and operated at 5 MHz. The arrays were bulk micromachined in silicon-on-insulator substrates, and contained flexural unimorph membranes comprising the device silicon, lead zirconate titanate (PZT), and electrode layers. Through-silicon interconnects were fabricated by depositing a thin-film conformal copper layer in the bulk micromachined via under each PMUT membrane and photolithographically patterning this copper layer on the back of the substrate to facilitate contact with the individually addressable matrix array elements. Cable assemblies containing insulated 45-AWG copper wires and a termination silicon substrate were thermocompression bonded to the PMUT substrate for signal wire interconnection to the PMUT array. Side-viewing 14-Fr catheters were fabricated and introduced through the femoral vein in an adult porcine model. Real-time 3-D images were acquired from the right atrium using a prototype ultrasound scanner. Full 60° × 60° volume sectors were obtained with penetration depth of 8 to 10 cm at frame rates of 26 to 31 volumes per second.

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Published In

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

DOI

EISSN

1525-8955

ISSN

0885-3010

Publication Date

October 2014

Volume

61

Issue

10

Start / End Page

1754 / 1764

Related Subject Headings

  • Acoustics
  • 51 Physical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences
 

Citation

APA
Chicago
ICMJE
MLA
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Dausch, D. E., Gilchrist, K. H., Carlson, J. B., Hall, S. D., Castellucci, J. B., & von Ramm, O. T. (2014). In vivo real-time 3-D intracardiac echo using PMUT arrays. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 61(10), 1754–1764. https://doi.org/10.1109/tuffc.2014.006452
Dausch, David E., Kristin H. Gilchrist, James B. Carlson, Stephen D. Hall, John B. Castellucci, and Olaf T. von Ramm. “In vivo real-time 3-D intracardiac echo using PMUT arrays.IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 61, no. 10 (October 2014): 1754–64. https://doi.org/10.1109/tuffc.2014.006452.
Dausch DE, Gilchrist KH, Carlson JB, Hall SD, Castellucci JB, von Ramm OT. In vivo real-time 3-D intracardiac echo using PMUT arrays. IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2014 Oct;61(10):1754–64.
Dausch, David E., et al. “In vivo real-time 3-D intracardiac echo using PMUT arrays.IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 61, no. 10, Oct. 2014, pp. 1754–64. Epmc, doi:10.1109/tuffc.2014.006452.
Dausch DE, Gilchrist KH, Carlson JB, Hall SD, Castellucci JB, von Ramm OT. In vivo real-time 3-D intracardiac echo using PMUT arrays. IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2014 Oct;61(10):1754–1764.

Published In

IEEE transactions on ultrasonics, ferroelectrics, and frequency control

DOI

EISSN

1525-8955

ISSN

0885-3010

Publication Date

October 2014

Volume

61

Issue

10

Start / End Page

1754 / 1764

Related Subject Headings

  • Acoustics
  • 51 Physical sciences
  • 40 Engineering
  • 09 Engineering
  • 02 Physical Sciences