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Grating couplers for dual-channel thin-film waveguide sensors produced by transmission photolithography

Publication ,  Journal Article
Plowman, TE; Peters, CR; Monty Reichert, W
Published in: Journal of Biomedical Optics
January 1, 1997

Grating-coupled, thin-film integrated optical waveguide (IOW) structures were fabricated using standard transmission photolithography and employed in a fluoro-affinity assay for the trace detection of analyte. Using a ruled chrome-on-quartz mask with a 0.7 μ repeat, gratings of three etch depths - 0.6, 0.8, and 1.0 μm - were ion milled into 0.5-mm-thick quartz substrates. Silicon oxynitride (SiON) guiding films (1.5 μm) were deposited on the etched substrates by plasma-enhanced chemical vapor deposition (PECVD). Coupling efficiencies for the first diffracted grating orders into the zero-order IOW-guided modes were evaluated at 632.8 nm. The deepest gratings coupled the most light; however, their efficiency was less than half that of prisms. Binding isotherms for fluorescently labeled avidin (Cy5-Av) binding to a biotinylated bovine serum albumin (BSA) adlayer were generated from both prism- and grating-coupled SiON sensor data. Both techniques discriminated the binding of avidin from a 10-15 M solution; however run-to-run (intraassay) and between-sensor (interassay) variability reduced reliability of the measurements. © 1997 Society of Photo-Optical Instru-mentation Engineers.

Duke Scholars

Published In

Journal of Biomedical Optics

DOI

ISSN

1083-3668

Publication Date

January 1, 1997

Volume

2

Issue

4

Start / End Page

350 / 357

Related Subject Headings

  • Optics
  • 5102 Atomic, molecular and optical physics
  • 4003 Biomedical engineering
  • 3212 Ophthalmology and optometry
  • 1113 Opthalmology and Optometry
  • 0903 Biomedical Engineering
  • 0205 Optical Physics
 

Citation

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Plowman, T. E., Peters, C. R., & Monty Reichert, W. (1997). Grating couplers for dual-channel thin-film waveguide sensors produced by transmission photolithography. Journal of Biomedical Optics, 2(4), 350–357. https://doi.org/10.1117/12.281501
Plowman, T. E., C. R. Peters, and W. Monty Reichert. “Grating couplers for dual-channel thin-film waveguide sensors produced by transmission photolithography.” Journal of Biomedical Optics 2, no. 4 (January 1, 1997): 350–57. https://doi.org/10.1117/12.281501.
Plowman TE, Peters CR, Monty Reichert W. Grating couplers for dual-channel thin-film waveguide sensors produced by transmission photolithography. Journal of Biomedical Optics. 1997 Jan 1;2(4):350–7.
Plowman, T. E., et al. “Grating couplers for dual-channel thin-film waveguide sensors produced by transmission photolithography.” Journal of Biomedical Optics, vol. 2, no. 4, Jan. 1997, pp. 350–57. Scopus, doi:10.1117/12.281501.
Plowman TE, Peters CR, Monty Reichert W. Grating couplers for dual-channel thin-film waveguide sensors produced by transmission photolithography. Journal of Biomedical Optics. 1997 Jan 1;2(4):350–357.

Published In

Journal of Biomedical Optics

DOI

ISSN

1083-3668

Publication Date

January 1, 1997

Volume

2

Issue

4

Start / End Page

350 / 357

Related Subject Headings

  • Optics
  • 5102 Atomic, molecular and optical physics
  • 4003 Biomedical engineering
  • 3212 Ophthalmology and optometry
  • 1113 Opthalmology and Optometry
  • 0903 Biomedical Engineering
  • 0205 Optical Physics