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Optical waveguide biosensor based on two-dimensional diffractive elements obtained by nano-imprint lithography

Publication ,  Conference
Grego, S; Yang, C; Bower, CA; Stoner, BR; Suleski, TJ
Published in: Proceedings of SPIE - The International Society for Optical Engineering
May 24, 2007

This work focuses on the effects of custom-designed, two-dimensional grating structures on the sensitivity of optical waveguides biosensors in the input grating coupler configuration. Calculations suggest that suitably designed diffractive structures with optimum pitch in two orthogonal directions can increase the sensitivity of devices when compared to a conventional one-dimensional grating under the same conditions. A set of six diffractive structures designed for 1550 nm wavelength were fabricated by thermal nano-imprint lithography on silicon oxynitride waveguides; the silicon master stamp was patterned by deep UV stepper lithography. Preliminary experimental results indicate a sensitivity enhancement of a factor two due to the 2D diffractive couplers.

Duke Scholars

Published In

Proceedings of SPIE - The International Society for Optical Engineering

DOI

ISSN

0277-786X

Publication Date

May 24, 2007

Volume

6475

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering
 

Citation

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Grego, S., Yang, C., Bower, C. A., Stoner, B. R., & Suleski, T. J. (2007). Optical waveguide biosensor based on two-dimensional diffractive elements obtained by nano-imprint lithography. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6475). https://doi.org/10.1117/12.700616
Grego, S., C. Yang, C. A. Bower, B. R. Stoner, and T. J. Suleski. “Optical waveguide biosensor based on two-dimensional diffractive elements obtained by nano-imprint lithography.” In Proceedings of SPIE - The International Society for Optical Engineering, Vol. 6475, 2007. https://doi.org/10.1117/12.700616.
Grego S, Yang C, Bower CA, Stoner BR, Suleski TJ. Optical waveguide biosensor based on two-dimensional diffractive elements obtained by nano-imprint lithography. In: Proceedings of SPIE - The International Society for Optical Engineering. 2007.
Grego, S., et al. “Optical waveguide biosensor based on two-dimensional diffractive elements obtained by nano-imprint lithography.” Proceedings of SPIE - The International Society for Optical Engineering, vol. 6475, 2007. Scopus, doi:10.1117/12.700616.
Grego S, Yang C, Bower CA, Stoner BR, Suleski TJ. Optical waveguide biosensor based on two-dimensional diffractive elements obtained by nano-imprint lithography. Proceedings of SPIE - The International Society for Optical Engineering. 2007.

Published In

Proceedings of SPIE - The International Society for Optical Engineering

DOI

ISSN

0277-786X

Publication Date

May 24, 2007

Volume

6475

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering