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Convergent ion beam alteration of 2D materials and metal-2D interfaces

Publication ,  Journal Article
Cheng, Z; Abuzaid, H; Yu, Y; Zhang, F; Li, Y; Noyce, SG; Williams, NX; Lin, YC; Doherty, JL; Tao, C; Cao, L; Franklin, AD
Published in: 2D Materials
June 6, 2019

Tailoring the properties of two-dimensional (2D) crystals is important for both understanding the material behavior and exploring new functionality. Here we demonstrate the alteration of MoS2 and metal-MoS2 interfaces using a convergent ion beam. Different beam energies, from 60 eV to 600 eV, are shown to have distinct effects on the optical and electrical properties of MoS2. Defects and deformations created across different layers were investigated, revealing an unanticipated improvement in the Raman peak intensity of multilayer MoS2 when exposed to a 60 eV Ar+ ion beam, and attenuation of the MoS2 Raman peaks with a 200 eV ion beam. Using cross-sectional scanning transmission electron microscopy (STEM), alteration of the crystal structure after a 600 eV ion beam bombardment was observed, including generated defects and voids in the crystal. We show that the 60 eV ion beam yields improvement in the metal-MoS2 interface by decreasing the contact resistance from 17.5 kΩ • µm to 6 kΩ • µm at a carrier concentration of n 2D = 5.4 × 1012 cm-2. These results advance the use of low-energy ion beams to modify 2D materials and interfaces for tuning and improving performance in applications of sensors, transistors, optoelectronics, and so forth.

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Published In

2D Materials

DOI

EISSN

2053-1583

Publication Date

June 6, 2019

Volume

6

Issue

3

Related Subject Headings

  • 5104 Condensed matter physics
  • 4018 Nanotechnology
  • 4016 Materials engineering
  • 1007 Nanotechnology
  • 0912 Materials Engineering
  • 0303 Macromolecular and Materials Chemistry
 

Citation

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Cheng, Z., Abuzaid, H., Yu, Y., Zhang, F., Li, Y., Noyce, S. G., … Franklin, A. D. (2019). Convergent ion beam alteration of 2D materials and metal-2D interfaces. 2D Materials, 6(3). https://doi.org/10.1088/2053-1583/ab1764
Cheng, Z., H. Abuzaid, Y. Yu, F. Zhang, Y. Li, S. G. Noyce, N. X. Williams, et al. “Convergent ion beam alteration of 2D materials and metal-2D interfaces.” 2D Materials 6, no. 3 (June 6, 2019). https://doi.org/10.1088/2053-1583/ab1764.
Cheng Z, Abuzaid H, Yu Y, Zhang F, Li Y, Noyce SG, et al. Convergent ion beam alteration of 2D materials and metal-2D interfaces. 2D Materials. 2019 Jun 6;6(3).
Cheng, Z., et al. “Convergent ion beam alteration of 2D materials and metal-2D interfaces.” 2D Materials, vol. 6, no. 3, June 2019. Scopus, doi:10.1088/2053-1583/ab1764.
Cheng Z, Abuzaid H, Yu Y, Zhang F, Li Y, Noyce SG, Williams NX, Lin YC, Doherty JL, Tao C, Cao L, Franklin AD. Convergent ion beam alteration of 2D materials and metal-2D interfaces. 2D Materials. 2019 Jun 6;6(3).
Journal cover image

Published In

2D Materials

DOI

EISSN

2053-1583

Publication Date

June 6, 2019

Volume

6

Issue

3

Related Subject Headings

  • 5104 Condensed matter physics
  • 4018 Nanotechnology
  • 4016 Materials engineering
  • 1007 Nanotechnology
  • 0912 Materials Engineering
  • 0303 Macromolecular and Materials Chemistry