Kinetically stabilized high-temperature InN growth
Publication
, Journal Article
Cross, GB; Ahmad, Z; Seidlitz, D; Vernon, M; Dietz, N; Deocampo, D; Gebregiorgis, D; Lei, S; Kozhanov, A
Published in: Journal of Crystal Growth
April 15, 2020
We report on indium nitride growth on sapphire substrates by migration-enhanced plasma-assisted metal organic chemical vapor deposition (MEPA-MOCVD). The growth is studied in the temperature range from 700 °C to 957 °C, well above the decomposition temperature of indium nitride in conventional MOCVD. Raman spectroscopy, atomic force microscopy, and X-ray diffraction indicate polycrystalline grainy InN film growth.
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Published In
Journal of Crystal Growth
DOI
ISSN
0022-0248
Publication Date
April 15, 2020
Volume
536
Related Subject Headings
- Applied Physics
- 4016 Materials engineering
- 3403 Macromolecular and materials chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry
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Cross, G. B., Ahmad, Z., Seidlitz, D., Vernon, M., Dietz, N., Deocampo, D., … Kozhanov, A. (2020). Kinetically stabilized high-temperature InN growth. Journal of Crystal Growth, 536. https://doi.org/10.1016/j.jcrysgro.2020.125574
Cross, G. B., Z. Ahmad, D. Seidlitz, M. Vernon, N. Dietz, D. Deocampo, D. Gebregiorgis, S. Lei, and A. Kozhanov. “Kinetically stabilized high-temperature InN growth.” Journal of Crystal Growth 536 (April 15, 2020). https://doi.org/10.1016/j.jcrysgro.2020.125574.
Cross GB, Ahmad Z, Seidlitz D, Vernon M, Dietz N, Deocampo D, et al. Kinetically stabilized high-temperature InN growth. Journal of Crystal Growth. 2020 Apr 15;536.
Cross, G. B., et al. “Kinetically stabilized high-temperature InN growth.” Journal of Crystal Growth, vol. 536, Apr. 2020. Scopus, doi:10.1016/j.jcrysgro.2020.125574.
Cross GB, Ahmad Z, Seidlitz D, Vernon M, Dietz N, Deocampo D, Gebregiorgis D, Lei S, Kozhanov A. Kinetically stabilized high-temperature InN growth. Journal of Crystal Growth. 2020 Apr 15;536.
Published In
Journal of Crystal Growth
DOI
ISSN
0022-0248
Publication Date
April 15, 2020
Volume
536
Related Subject Headings
- Applied Physics
- 4016 Materials engineering
- 3403 Macromolecular and materials chemistry
- 0912 Materials Engineering
- 0306 Physical Chemistry (incl. Structural)
- 0303 Macromolecular and Materials Chemistry