Contribution of the surface mechanism to sputtering of (001) Ni: molecular dynamics computer simulation studies
Publication
, Journal Article
Samoilov, VN; Tatur, AE; Kovaleva, NA; Kozhanov, AE
Published in: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
January 1, 1999
We calculated the contribution to sputtering yield of atoms strongly blocked towards the surface normal during ejection, sputtered at final polar angles Ve less than initial polar ejection angles Vo, for Ar+ ion bombardment of (001) face of single crystal Ni at normal incidence. The dominant contribution of the surface mechanism (i.e. of atoms sputtered due to blocking during ejection) to sputtering was found for low ion energies. It was shown that for 1000 eV Ar+ ion bombardment of (001) Ni the contribution of strongly blocked ejected atoms resulted in the shift of the maximum of polar angular distribution of sputtered atoms from the surface normal with increase of sputtered atoms energy (for energies greater than 20 eV).
Duke Scholars
Published In
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
DOI
ISSN
0168-583X
Publication Date
January 1, 1999
Volume
153
Issue
1-4
Start / End Page
319 / 325
Related Subject Headings
- Applied Physics
- 5106 Nuclear and plasma physics
- 5104 Condensed matter physics
- 0915 Interdisciplinary Engineering
- 0402 Geochemistry
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics
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APA
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Samoilov, V. N., Tatur, A. E., Kovaleva, N. A., & Kozhanov, A. E. (1999). Contribution of the surface mechanism to sputtering of (001) Ni: molecular dynamics computer simulation studies. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 153(1–4), 319–325. https://doi.org/10.1016/S0168-583X(99)00216-5
Samoilov, V. N., A. E. Tatur, N. A. Kovaleva, and A. E. Kozhanov. “Contribution of the surface mechanism to sputtering of (001) Ni: molecular dynamics computer simulation studies.” Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 153, no. 1–4 (January 1, 1999): 319–25. https://doi.org/10.1016/S0168-583X(99)00216-5.
Samoilov VN, Tatur AE, Kovaleva NA, Kozhanov AE. Contribution of the surface mechanism to sputtering of (001) Ni: molecular dynamics computer simulation studies. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 1999 Jan 1;153(1–4):319–25.
Samoilov, V. N., et al. “Contribution of the surface mechanism to sputtering of (001) Ni: molecular dynamics computer simulation studies.” Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 153, no. 1–4, Jan. 1999, pp. 319–25. Scopus, doi:10.1016/S0168-583X(99)00216-5.
Samoilov VN, Tatur AE, Kovaleva NA, Kozhanov AE. Contribution of the surface mechanism to sputtering of (001) Ni: molecular dynamics computer simulation studies. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 1999 Jan 1;153(1–4):319–325.
Published In
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
DOI
ISSN
0168-583X
Publication Date
January 1, 1999
Volume
153
Issue
1-4
Start / End Page
319 / 325
Related Subject Headings
- Applied Physics
- 5106 Nuclear and plasma physics
- 5104 Condensed matter physics
- 0915 Interdisciplinary Engineering
- 0402 Geochemistry
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics