EEDF control through gas injection into a plasma plume
Publication
, Conference
Trent, KR; Shabshelowitz, A; Gallimore, AD
Published in: 38th EPS Conference on Plasma Physics 2011, EPS 2011 - Europhysics Conference Abstracts
December 1, 2011
Electron Energy Distribution Function (EEDF) measurements were made in a magnetically enhanced, Inductively Coupled Plasma (ICP) with and without the introduction of an axially injected neutral jet of argon gas with a small relative flow. A lab-built RF compensated Langmuir probe (LP) along with a Hiden LP controller were used to obtain data. Results show that this counterflow of neutral gas has little effect on the EEDF.
Duke Scholars
Published In
38th EPS Conference on Plasma Physics 2011, EPS 2011 - Europhysics Conference Abstracts
Publication Date
December 1, 2011
Volume
35 1
Start / End Page
157 / 160
Citation
APA
Chicago
ICMJE
MLA
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Trent, K. R., Shabshelowitz, A., & Gallimore, A. D. (2011). EEDF control through gas injection into a plasma plume. In 38th EPS Conference on Plasma Physics 2011, EPS 2011 - Europhysics Conference Abstracts (Vol. 35 1, pp. 157–160).
Trent, K. R., A. Shabshelowitz, and A. D. Gallimore. “EEDF control through gas injection into a plasma plume.” In 38th EPS Conference on Plasma Physics 2011, EPS 2011 - Europhysics Conference Abstracts, 35 1:157–60, 2011.
Trent KR, Shabshelowitz A, Gallimore AD. EEDF control through gas injection into a plasma plume. In: 38th EPS Conference on Plasma Physics 2011, EPS 2011 - Europhysics Conference Abstracts. 2011. p. 157–60.
Trent, K. R., et al. “EEDF control through gas injection into a plasma plume.” 38th EPS Conference on Plasma Physics 2011, EPS 2011 - Europhysics Conference Abstracts, vol. 35 1, 2011, pp. 157–60.
Trent KR, Shabshelowitz A, Gallimore AD. EEDF control through gas injection into a plasma plume. 38th EPS Conference on Plasma Physics 2011, EPS 2011 - Europhysics Conference Abstracts. 2011. p. 157–160.
Published In
38th EPS Conference on Plasma Physics 2011, EPS 2011 - Europhysics Conference Abstracts
Publication Date
December 1, 2011
Volume
35 1
Start / End Page
157 / 160