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Sensitivity Enhancement of Polyorganophosphazenes to Radiation with 2,2,4,4,6,6-Hexakis(2-Hydr0Xyethyl Methacrylate)Cyclotriphosphazene Monomer and Its Application for Negative Resists

Publication ,  Journal Article
Grune, GL; Greer, RW; Chern, RT; Stannett, VT
Published in: Journal of Macromolecular Science, Part A
1994

Duke Scholars

Published In

Journal of Macromolecular Science, Part A

DOI

ISSN

1060-1325

Publication Date

1994

Volume

31

Issue

9

Start / End Page

1193 / 1206

Publisher

Informa UK Limited

Related Subject Headings

  • Polymers
  • 3403 Macromolecular and materials chemistry
  • 0912 Materials Engineering
  • 0303 Macromolecular and Materials Chemistry
 

Citation

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Grune, G. L., Greer, R. W., Chern, R. T., & Stannett, V. T. (1994). Sensitivity Enhancement of Polyorganophosphazenes to Radiation with 2,2,4,4,6,6-Hexakis(2-Hydr0Xyethyl Methacrylate)Cyclotriphosphazene Monomer and Its Application for Negative Resists. Journal of Macromolecular Science, Part A, 31(9), 1193–1206. https://doi.org/10.1080/10601329408545715
Grune, G. L., R. W. Greer, R. T. Chern, and V. T. Stannett. “Sensitivity Enhancement of Polyorganophosphazenes to Radiation with 2,2,4,4,6,6-Hexakis(2-Hydr0Xyethyl Methacrylate)Cyclotriphosphazene Monomer and Its Application for Negative Resists.” Journal of Macromolecular Science, Part A 31, no. 9 (1994): 1193–1206. https://doi.org/10.1080/10601329408545715.
Grune, G. L., et al. “Sensitivity Enhancement of Polyorganophosphazenes to Radiation with 2,2,4,4,6,6-Hexakis(2-Hydr0Xyethyl Methacrylate)Cyclotriphosphazene Monomer and Its Application for Negative Resists.” Journal of Macromolecular Science, Part A, vol. 31, no. 9, Informa UK Limited, 1994, pp. 1193–206. Crossref, doi:10.1080/10601329408545715.
Grune GL, Greer RW, Chern RT, Stannett VT. Sensitivity Enhancement of Polyorganophosphazenes to Radiation with 2,2,4,4,6,6-Hexakis(2-Hydr0Xyethyl Methacrylate)Cyclotriphosphazene Monomer and Its Application for Negative Resists. Journal of Macromolecular Science, Part A. Informa UK Limited; 1994;31(9):1193–1206.
Journal cover image

Published In

Journal of Macromolecular Science, Part A

DOI

ISSN

1060-1325

Publication Date

1994

Volume

31

Issue

9

Start / End Page

1193 / 1206

Publisher

Informa UK Limited

Related Subject Headings

  • Polymers
  • 3403 Macromolecular and materials chemistry
  • 0912 Materials Engineering
  • 0303 Macromolecular and Materials Chemistry