A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks
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Nishino, H; Toda, M; Yano, Y; Kajita, M; Ido, T; Hara, M; Ono, T
Published in: 2019 20th International Conference on Solid State Sensors Actuators and Microsystems and Eurosensors Xxxiii Transducers 2019 and Eurosensors Xxxiii
June 1, 2019
This paper reports the design, fabrication and evaluation of a reflection-type micro Rb vapor cell fabricated by local anodic bonding of small 45° mirrors. The 45° mirrors with a Bragg reflector are fabricated by using dicing process. The vapor cells having a horizontal cavity with the 45° mirrors at the both ends are fabricated by anodic bonding process. Optical absorption of Rb and CPT (Coherent Population Trapping) resonance for atomic clock operation are evaluated.
Duke Scholars
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2019 20th International Conference on Solid State Sensors Actuators and Microsystems and Eurosensors Xxxiii Transducers 2019 and Eurosensors Xxxiii
DOI
Publication Date
June 1, 2019
Start / End Page
1530 / 1532
Citation
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Nishino, H., Toda, M., Yano, Y., Kajita, M., Ido, T., Hara, M., & Ono, T. (2019). A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks. In 2019 20th International Conference on Solid State Sensors Actuators and Microsystems and Eurosensors Xxxiii Transducers 2019 and Eurosensors Xxxiii (pp. 1530–1532). https://doi.org/10.1109/TRANSDUCERS.2019.8808772
Nishino, H., M. Toda, Y. Yano, M. Kajita, T. Ido, M. Hara, and T. Ono. “A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks.” In 2019 20th International Conference on Solid State Sensors Actuators and Microsystems and Eurosensors Xxxiii Transducers 2019 and Eurosensors Xxxiii, 1530–32, 2019. https://doi.org/10.1109/TRANSDUCERS.2019.8808772.
Nishino H, Toda M, Yano Y, Kajita M, Ido T, Hara M, et al. A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks. In: 2019 20th International Conference on Solid State Sensors Actuators and Microsystems and Eurosensors Xxxiii Transducers 2019 and Eurosensors Xxxiii. 2019. p. 1530–2.
Nishino, H., et al. “A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks.” 2019 20th International Conference on Solid State Sensors Actuators and Microsystems and Eurosensors Xxxiii Transducers 2019 and Eurosensors Xxxiii, 2019, pp. 1530–32. Scopus, doi:10.1109/TRANSDUCERS.2019.8808772.
Nishino H, Toda M, Yano Y, Kajita M, Ido T, Hara M, Ono T. A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks. 2019 20th International Conference on Solid State Sensors Actuators and Microsystems and Eurosensors Xxxiii Transducers 2019 and Eurosensors Xxxiii. 2019. p. 1530–1532.
Published In
2019 20th International Conference on Solid State Sensors Actuators and Microsystems and Eurosensors Xxxiii Transducers 2019 and Eurosensors Xxxiii
DOI
Publication Date
June 1, 2019
Start / End Page
1530 / 1532