Scholars@Duke

Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows

Publication ,  Conference
Vaca, BA; Yoshino, JK; Genet, WE; Benge, TA; Aggarwal, ID; Hutchens, TC
Published in: CLEO 2024
2024
Published version (DOI) Publisher Link

This study explores transmission enhancement and limitations for fabrication of anti-reflective structured surfaces (ARSS) by plasma etching gold nanoparticle mask on silica substrates. Etching time and depth were incremented to witness evolution of ARSS production.

Duke Scholars

Jude Yoshino
Author Jude Yoshino  

Published In

CLEO 2024

DOI

10.1364/cleo_at.2024.jth2a.15

Publication Date

2024

Start / End Page

JTh2A.15 / JTh2A.15

Publisher

Optica Publishing Group

Conference Name

CLEO: Applications and Technology
 

Citation

APA
Chicago
ICMJE
MLA
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Vaca, B. A., Yoshino, J. K., Genet, W. E., Benge, T. A., Aggarwal, I. D., & Hutchens, T. C. (2024). Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows. In CLEO 2024 (p. JTh2A.15-JTh2A.15). Optica Publishing Group. https://doi.org/10.1364/cleo_at.2024.jth2a.15
Vaca, Benjamin A., Jude K. Yoshino, William E. Genet, Tyler A. Benge, Ishwar D. Aggarwal, and Thomas C. Hutchens. “Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows.” In CLEO 2024, JTh2A.15-JTh2A.15. Optica Publishing Group, 2024. https://doi.org/10.1364/cleo_at.2024.jth2a.15.
Vaca BA, Yoshino JK, Genet WE, Benge TA, Aggarwal ID, Hutchens TC. Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows. In: CLEO 2024. Optica Publishing Group; 2024. p. JTh2A.15-JTh2A.15.
Vaca, Benjamin A., et al. “Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows.” CLEO 2024, Optica Publishing Group, 2024, p. JTh2A.15-JTh2A.15. Crossref, doi:10.1364/cleo_at.2024.jth2a.15.
Vaca BA, Yoshino JK, Genet WE, Benge TA, Aggarwal ID, Hutchens TC. Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows. CLEO 2024. Optica Publishing Group; 2024. p. JTh2A.15-JTh2A.15.

Published In

CLEO 2024

DOI

10.1364/cleo_at.2024.jth2a.15

Publication Date

2024

Start / End Page

JTh2A.15 / JTh2A.15

Publisher

Optica Publishing Group

Conference Name

CLEO: Applications and Technology