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Optical properties of micromachined polysilicon reflective surfaces with etching holes

Publication ,  Journal Article
Zou, J; Byrne, C; Liu, C; Brady, D
Published in: Proceedings of SPIE the International Society for Optical Engineering
December 1, 1998

MUMPS (Multi-User MEMS Process) is receiving increasingly wide use in micro optics. We have investigated the optical properties of the polysilicon reflective surface in a typical MUMPS chip within the visible light spectrum. The effect of etching holes on the reflected laser beam is studied. The reflectivity and diffraction patterns at five different wavelengths have been measured. The optical properties of the polysilicon reflective surface are greatly affected by the surface roughness, the etching holes, as well as the material. The etching holes contribute to diffraction and reduction of reflectivity. This study provides a basis for optimal design of micromachined free-space optical systems.

Duke Scholars

Published In

Proceedings of SPIE the International Society for Optical Engineering

DOI

ISSN

0277-786X

Publication Date

December 1, 1998

Volume

3511

Start / End Page

307 / 314

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering
 

Citation

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Zou, J., Byrne, C., Liu, C., & Brady, D. (1998). Optical properties of micromachined polysilicon reflective surfaces with etching holes. Proceedings of SPIE the International Society for Optical Engineering, 3511, 307–314. https://doi.org/10.1117/12.324315
Zou, J., C. Byrne, C. Liu, and D. Brady. “Optical properties of micromachined polysilicon reflective surfaces with etching holes.” Proceedings of SPIE the International Society for Optical Engineering 3511 (December 1, 1998): 307–14. https://doi.org/10.1117/12.324315.
Zou J, Byrne C, Liu C, Brady D. Optical properties of micromachined polysilicon reflective surfaces with etching holes. Proceedings of SPIE the International Society for Optical Engineering. 1998 Dec 1;3511:307–14.
Zou, J., et al. “Optical properties of micromachined polysilicon reflective surfaces with etching holes.” Proceedings of SPIE the International Society for Optical Engineering, vol. 3511, Dec. 1998, pp. 307–14. Scopus, doi:10.1117/12.324315.
Zou J, Byrne C, Liu C, Brady D. Optical properties of micromachined polysilicon reflective surfaces with etching holes. Proceedings of SPIE the International Society for Optical Engineering. 1998 Dec 1;3511:307–314.

Published In

Proceedings of SPIE the International Society for Optical Engineering

DOI

ISSN

0277-786X

Publication Date

December 1, 1998

Volume

3511

Start / End Page

307 / 314

Related Subject Headings

  • 5102 Atomic, molecular and optical physics
  • 4009 Electronics, sensors and digital hardware
  • 4006 Communications engineering