Optical properties of micromachined polysilicon reflective surfaces with etching holes
Publication
, Journal Article
Zou, J; Byrne, C; Liu, C; Brady, D
Published in: Proceedings of SPIE the International Society for Optical Engineering
December 1, 1998
MUMPS (Multi-User MEMS Process) is receiving increasingly wide use in micro optics. We have investigated the optical properties of the polysilicon reflective surface in a typical MUMPS chip within the visible light spectrum. The effect of etching holes on the reflected laser beam is studied. The reflectivity and diffraction patterns at five different wavelengths have been measured. The optical properties of the polysilicon reflective surface are greatly affected by the surface roughness, the etching holes, as well as the material. The etching holes contribute to diffraction and reduction of reflectivity. This study provides a basis for optimal design of micromachined free-space optical systems.
Duke Scholars
Published In
Proceedings of SPIE the International Society for Optical Engineering
DOI
ISSN
0277-786X
Publication Date
December 1, 1998
Volume
3511
Start / End Page
307 / 314
Related Subject Headings
- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering
Citation
APA
Chicago
ICMJE
MLA
NLM
Zou, J., Byrne, C., Liu, C., & Brady, D. (1998). Optical properties of micromachined polysilicon reflective surfaces with etching holes. Proceedings of SPIE the International Society for Optical Engineering, 3511, 307–314. https://doi.org/10.1117/12.324315
Zou, J., C. Byrne, C. Liu, and D. Brady. “Optical properties of micromachined polysilicon reflective surfaces with etching holes.” Proceedings of SPIE the International Society for Optical Engineering 3511 (December 1, 1998): 307–14. https://doi.org/10.1117/12.324315.
Zou J, Byrne C, Liu C, Brady D. Optical properties of micromachined polysilicon reflective surfaces with etching holes. Proceedings of SPIE the International Society for Optical Engineering. 1998 Dec 1;3511:307–14.
Zou, J., et al. “Optical properties of micromachined polysilicon reflective surfaces with etching holes.” Proceedings of SPIE the International Society for Optical Engineering, vol. 3511, Dec. 1998, pp. 307–14. Scopus, doi:10.1117/12.324315.
Zou J, Byrne C, Liu C, Brady D. Optical properties of micromachined polysilicon reflective surfaces with etching holes. Proceedings of SPIE the International Society for Optical Engineering. 1998 Dec 1;3511:307–314.
Published In
Proceedings of SPIE the International Society for Optical Engineering
DOI
ISSN
0277-786X
Publication Date
December 1, 1998
Volume
3511
Start / End Page
307 / 314
Related Subject Headings
- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering