Holographic 3D imaging of microstructures
Publication
, Journal Article
Balberg, M; Barbastathis, G; Brady, DJ; Choi, BK; Liu, C
Published in: Proceedings of SPIE the International Society for Optical Engineering
December 1, 1999
A volume holographic matched filter is used for three-dimensional imaging of silicon microstructures. The filter is designed by recording a hologram that is matched to the object depth, allowing confocal imaging of the structure. Confocal imaging of micro devices provides the capability to image the performance of the device, which is not possible in scanning-electron-microscopes (SEM). A matched holographic filter can also provide more information about the device than regular confocal imaging. We present a scanned image of a silicon wafer with micro-fabricated trenches.
Duke Scholars
Published In
Proceedings of SPIE the International Society for Optical Engineering
ISSN
0277-786X
Publication Date
December 1, 1999
Volume
3801
Start / End Page
202 / 207
Related Subject Headings
- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering
Citation
APA
Chicago
ICMJE
MLA
NLM
Balberg, M., Barbastathis, G., Brady, D. J., Choi, B. K., & Liu, C. (1999). Holographic 3D imaging of microstructures. Proceedings of SPIE the International Society for Optical Engineering, 3801, 202–207.
Balberg, M., G. Barbastathis, D. J. Brady, B. K. Choi, and C. Liu. “Holographic 3D imaging of microstructures.” Proceedings of SPIE the International Society for Optical Engineering 3801 (December 1, 1999): 202–7.
Balberg M, Barbastathis G, Brady DJ, Choi BK, Liu C. Holographic 3D imaging of microstructures. Proceedings of SPIE the International Society for Optical Engineering. 1999 Dec 1;3801:202–7.
Balberg, M., et al. “Holographic 3D imaging of microstructures.” Proceedings of SPIE the International Society for Optical Engineering, vol. 3801, Dec. 1999, pp. 202–07.
Balberg M, Barbastathis G, Brady DJ, Choi BK, Liu C. Holographic 3D imaging of microstructures. Proceedings of SPIE the International Society for Optical Engineering. 1999 Dec 1;3801:202–207.
Published In
Proceedings of SPIE the International Society for Optical Engineering
ISSN
0277-786X
Publication Date
December 1, 1999
Volume
3801
Start / End Page
202 / 207
Related Subject Headings
- 5102 Atomic, molecular and optical physics
- 4009 Electronics, sensors and digital hardware
- 4006 Communications engineering