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Study of fusion bonding of diamond to silicon for silicon-on-diamond technology

Publication ,  Journal Article
Yushin, GN; Wolter, SD; Kvit, AV; Collazo, R; Stoner, BR; Prater, JT; Sitar, Z
Published in: Applied Physics Letters
2002

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Published In

Applied Physics Letters

DOI

Publication Date

2002

Volume

81

Issue

17

Start / End Page

3275

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 10 Technology
  • 09 Engineering
  • 02 Physical Sciences
 

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Yushin, G. N., Wolter, S. D., Kvit, A. V., Collazo, R., Stoner, B. R., Prater, J. T., & Sitar, Z. (2002). Study of fusion bonding of diamond to silicon for silicon-on-diamond technology. Applied Physics Letters, 81(17), 3275. https://doi.org/10.1063/1.1516636
Yushin, G. N., S. D. Wolter, A. V. Kvit, R. Collazo, B. R. Stoner, J. T. Prater, and Z. Sitar. “Study of fusion bonding of diamond to silicon for silicon-on-diamond technology.” Applied Physics Letters 81, no. 17 (2002): 3275. https://doi.org/10.1063/1.1516636.
Yushin GN, Wolter SD, Kvit AV, Collazo R, Stoner BR, Prater JT, et al. Study of fusion bonding of diamond to silicon for silicon-on-diamond technology. Applied Physics Letters. 2002;81(17):3275.
Yushin, G. N., et al. “Study of fusion bonding of diamond to silicon for silicon-on-diamond technology.” Applied Physics Letters, vol. 81, no. 17, 2002, p. 3275. Manual, doi:10.1063/1.1516636.
Yushin GN, Wolter SD, Kvit AV, Collazo R, Stoner BR, Prater JT, Sitar Z. Study of fusion bonding of diamond to silicon for silicon-on-diamond technology. Applied Physics Letters. 2002;81(17):3275.

Published In

Applied Physics Letters

DOI

Publication Date

2002

Volume

81

Issue

17

Start / End Page

3275

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 10 Technology
  • 09 Engineering
  • 02 Physical Sciences