Scholars@Duke publication: Fabrication of diamond thin-film thermistors for high-temperature applications

Fabrication of diamond thin-film thermistors for high-temperature applications

Publication , Journal Article

Bade, JP; Sahaida, SR; Stoner, BR; von Windheim, JA; Glass, JT; Miyata, K; Nishimura, K; Kobashi, K

Published in: Diamond and Related Materials

April 13, 1993

CVD diamond thin-film thermistors have been fabricated in various geometries and at different doping levels in an effort to achieve practical resistance-vs.-temperature characteristics. Typical activation energy values reported for polycrystalline films were combined with a targeted resistance range to plot an idealized relationship between resistance and temperature for CVD diamond thin films. The optimum device geometry and boron concentration were subsequently approximated from these ideal plots. Fabricated devices were electrically characterized in air at temperatures ranging from 25°C to over 500°C. Repeatability was demonstrated over two temperature cycles and stability was maintained at 500°C for 9 h. Effects of varying thermistor geometry and boron dopant concentration to achieve useful resistance-temperature relationships will be discussed. © 1993.

Duke Scholars

Author Brian R. Stoner Electrical and Computer Engineering

Author Jesko Von Windheim Environmental Sciences and Policy

Author Jeffrey Glass Electrical and Computer Engineering

Published In

Diamond and Related Materials

DOI

10.1016/0925-9635(93)90230-Y

ISSN

0925-9635

Publication Date

April 13, 1993

Volume

Issue

5-7

Start / End Page

816 / 819

Related Subject Headings

Applied Physics
5104 Condensed matter physics
4018 Nanotechnology
4016 Materials engineering
0912 Materials Engineering
0910 Manufacturing Engineering
0904 Chemical Engineering

Citation

APA

Chicago

ICMJE

MLA

NLM

Bade, J. P., Sahaida, S. R., Stoner, B. R., von Windheim, J. A., Glass, J. T., Miyata, K., … Kobashi, K. (1993). Fabrication of diamond thin-film thermistors for high-temperature applications. Diamond and Related Materials, 2(5–7), 816–819. https://doi.org/10.1016/0925-9635(93)90230-Y

Bade, J. P., S. R. Sahaida, B. R. Stoner, J. A. von Windheim, J. T. Glass, K. Miyata, K. Nishimura, and K. Kobashi. “Fabrication of diamond thin-film thermistors for high-temperature applications.” Diamond and Related Materials 2, no. 5–7 (April 13, 1993): 816–19. https://doi.org/10.1016/0925-9635(93)90230-Y.

Bade JP, Sahaida SR, Stoner BR, von Windheim JA, Glass JT, Miyata K, et al. Fabrication of diamond thin-film thermistors for high-temperature applications. Diamond and Related Materials. 1993 Apr 13;2(5–7):816–9.

Bade, J. P., et al. “Fabrication of diamond thin-film thermistors for high-temperature applications.” Diamond and Related Materials, vol. 2, no. 5–7, Apr. 1993, pp. 816–19. Scopus, doi:10.1016/0925-9635(93)90230-Y.

Bade JP, Sahaida SR, Stoner BR, von Windheim JA, Glass JT, Miyata K, Nishimura K, Kobashi K. Fabrication of diamond thin-film thermistors for high-temperature applications. Diamond and Related Materials. 1993 Apr 13;2(5–7):816–819.

Published In

Diamond and Related Materials

DOI

10.1016/0925-9635(93)90230-Y

ISSN

0925-9635

Publication Date

April 13, 1993

Volume

Issue

5-7

Start / End Page

816 / 819

Related Subject Headings

Applied Physics
5104 Condensed matter physics
4018 Nanotechnology
4016 Materials engineering
0912 Materials Engineering
0910 Manufacturing Engineering
0904 Chemical Engineering