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The formation of epitaxial hexagonal boron nitride on nickel substrates

Publication ,  Journal Article
Yang, PC; Prater, JT; Liu, W; Glass, JT; Davis, RF
Published in: Journal of Electronic Materials
December 2005

The various crystallographic forms of boron nitride (BN) are of great technological interest because of their demonstrated tribological, high-temperature, thermally conducting, electrically insulating, and wide-bandgap semiconductor properties. Unfortunately, the synthesis of crystalline BN films is still in the early stages of development. Furthermore, although polycrystalline BN films have been prepared by a variety of physical and chemical vapor deposition techniques, the capability does not currently exist for depositing large area single-crystal or oriented films of BN. Such single-crystal films are required for many applications of interest, especially in electronics. The present paper reports on a new approach to the oriented growth of boron nitride using a novel molten layer epitaxy technique. Well-oriented hexagonal boron nitride (h-BN) crystals were obtained with highly faceted crystal shapes. The h-BN was formed via precipitation from a molten, hydrogen-saturated Ni surface layer. Solid cubic BN was utilized as the source material and was dissolved into the substrate surface during a brief high-temperature anneal. It was found that surface melting occurred during this process and the B diffused into the Ni substrate, whereas the N was expelled into the growth chamber. Oriented BN was then precipitated as the surface layer was allowed to resolidify.

Duke Scholars

Published In

Journal of Electronic Materials

Publication Date

December 2005

Volume

34

Issue

12

Start / End Page

1558 / 1564

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 34 Chemical sciences
  • 1099 Other Technology
  • 0906 Electrical and Electronic Engineering
  • 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics
 

Citation

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Yang, P. C., Prater, J. T., Liu, W., Glass, J. T., & Davis, R. F. (2005). The formation of epitaxial hexagonal boron nitride on nickel substrates. Journal of Electronic Materials, 34(12), 1558–1564.
Yang, P. C., J. T. Prater, W. Liu, J. T. Glass, and R. F. Davis. “The formation of epitaxial hexagonal boron nitride on nickel substrates.” Journal of Electronic Materials 34, no. 12 (December 2005): 1558–64.
Yang PC, Prater JT, Liu W, Glass JT, Davis RF. The formation of epitaxial hexagonal boron nitride on nickel substrates. Journal of Electronic Materials. 2005 Dec;34(12):1558–64.
Yang, P. C., et al. “The formation of epitaxial hexagonal boron nitride on nickel substrates.” Journal of Electronic Materials, vol. 34, no. 12, Dec. 2005, pp. 1558–64.
Yang PC, Prater JT, Liu W, Glass JT, Davis RF. The formation of epitaxial hexagonal boron nitride on nickel substrates. Journal of Electronic Materials. 2005 Dec;34(12):1558–1564.

Published In

Journal of Electronic Materials

Publication Date

December 2005

Volume

34

Issue

12

Start / End Page

1558 / 1564

Related Subject Headings

  • Applied Physics
  • 51 Physical sciences
  • 40 Engineering
  • 34 Chemical sciences
  • 1099 Other Technology
  • 0906 Electrical and Electronic Engineering
  • 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics