Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen
Publication
, Journal Article
Evans, RD; Bentley, J; More, KL; Doll, GL; Glass, JT
Published in: Journal of Applied Physics
July 1, 2004
The use of radial distribution functions (RDF) for the characterization of amorphous carbon thin films containing silicon and hydrogen (Si-aC:H) was analyzed. The average number of neighbours located a distance r from away from an arbitrary atom in the sample was described by RDFs. Energy-filtered convergent-beam electron diffraction (EFCBED) and extended electron energy-loss fine structure (EXELFS) analyses were the methods, in the transmission electron microscope (TEM), to be used to obtain RDFs. The RDF characteristics were found to be correlated to thin film material properties.
Duke Scholars
Published In
Journal of Applied Physics
DOI
ISSN
0021-8979
Publication Date
July 1, 2004
Volume
96
Issue
1
Start / End Page
273 / 279
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 49 Mathematical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences
- 01 Mathematical Sciences
Citation
APA
Chicago
ICMJE
MLA
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Evans, R. D., Bentley, J., More, K. L., Doll, G. L., & Glass, J. T. (2004). Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen. Journal of Applied Physics, 96(1), 273–279. https://doi.org/10.1063/1.1760232
Evans, R. D., J. Bentley, K. L. More, G. L. Doll, and J. T. Glass. “Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen.” Journal of Applied Physics 96, no. 1 (July 1, 2004): 273–79. https://doi.org/10.1063/1.1760232.
Evans RD, Bentley J, More KL, Doll GL, Glass JT. Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen. Journal of Applied Physics. 2004 Jul 1;96(1):273–9.
Evans, R. D., et al. “Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen.” Journal of Applied Physics, vol. 96, no. 1, July 2004, pp. 273–79. Scopus, doi:10.1063/1.1760232.
Evans RD, Bentley J, More KL, Doll GL, Glass JT. Radial distribution function analyses of amorphous carbon thin films containing various levels of silicon and hydrogen. Journal of Applied Physics. 2004 Jul 1;96(1):273–279.
Published In
Journal of Applied Physics
DOI
ISSN
0021-8979
Publication Date
July 1, 2004
Volume
96
Issue
1
Start / End Page
273 / 279
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 49 Mathematical sciences
- 40 Engineering
- 09 Engineering
- 02 Physical Sciences
- 01 Mathematical Sciences