Large-area mosaic diamond films approaching single-crystal quality
Publication
, Journal Article
Geis, MW; Smith, HI; Argoitia, A; Angus, J; Ma, GHM; Glass, JT; Butler, J; Robinson, CJ; Pryor, R
Published in: Applied Physics Letters
December 1, 1991
The seeding for large-area mosaic diamond films approaching single-crystal quality is described. The technique includes patterned etching of relief structures in Si substrates, deposition from a slurry and orientation of macroscopic diamond seed crystals in the structures, and chemical vapor deposition overgrowth of the diamond seeds to form a continuous film. The film comprises ∼100 μm single crystals, which are separated by low-angle grain boundaries of a few degrees or less. We believe that these low-angle grain boundaries will not affect the electrical properties of majority-carrier devices.
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Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
December 1, 1991
Volume
58
Issue
22
Start / End Page
2485 / 2487
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences
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Geis, M. W., Smith, H. I., Argoitia, A., Angus, J., Ma, G. H. M., Glass, J. T., … Pryor, R. (1991). Large-area mosaic diamond films approaching single-crystal quality. Applied Physics Letters, 58(22), 2485–2487. https://doi.org/10.1063/1.104851
Geis, M. W., H. I. Smith, A. Argoitia, J. Angus, G. H. M. Ma, J. T. Glass, J. Butler, C. J. Robinson, and R. Pryor. “Large-area mosaic diamond films approaching single-crystal quality.” Applied Physics Letters 58, no. 22 (December 1, 1991): 2485–87. https://doi.org/10.1063/1.104851.
Geis MW, Smith HI, Argoitia A, Angus J, Ma GHM, Glass JT, et al. Large-area mosaic diamond films approaching single-crystal quality. Applied Physics Letters. 1991 Dec 1;58(22):2485–7.
Geis, M. W., et al. “Large-area mosaic diamond films approaching single-crystal quality.” Applied Physics Letters, vol. 58, no. 22, Dec. 1991, pp. 2485–87. Scopus, doi:10.1063/1.104851.
Geis MW, Smith HI, Argoitia A, Angus J, Ma GHM, Glass JT, Butler J, Robinson CJ, Pryor R. Large-area mosaic diamond films approaching single-crystal quality. Applied Physics Letters. 1991 Dec 1;58(22):2485–2487.
Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
December 1, 1991
Volume
58
Issue
22
Start / End Page
2485 / 2487
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences