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High Knudsen number fluid flow at near-standard temperature and pressure conditions using precision nanochannels

Publication ,  Journal Article
Fissell, WH; Conlisk, AT; Datta, S; Magistrelli, JM; Glass, JT; Fleischman, AJ; Roy, S
Published in: Microfluidics and Nanofluidics
February 1, 2011

Gas flows over a wide range of Knudsen numbers (~0.5-10) are studied using silicon nanochannel arrays with slit-shaped pores. The pore sizes of the silicon nanochannel arrays range from micrometer to sub-10-nm scales. The flows are generated under conditions of room temperature and near-atmospheric pressure (~22°C and ~101-115 kPa) and span the continuum flow, continuum-slip flow, transition flow and free-molecular flow regimes. The measured flow rates of helium, argon and carbon dioxide are in good agreement with a theoretical model (Unified Slip Model) proposed by Beskok and Karniadakis (Nanoscale Microscale Thermophys Eng 3:43-77, 1999). © 2010 Springer-Verlag.

Duke Scholars

Published In

Microfluidics and Nanofluidics

DOI

EISSN

1613-4990

ISSN

1613-4982

Publication Date

February 1, 2011

Volume

10

Issue

2

Start / End Page

425 / 433

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 4018 Nanotechnology
  • 4012 Fluid mechanics and thermal engineering
  • 1007 Nanotechnology
  • 0915 Interdisciplinary Engineering
  • 0913 Mechanical Engineering
 

Citation

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ICMJE
MLA
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Fissell, W. H., Conlisk, A. T., Datta, S., Magistrelli, J. M., Glass, J. T., Fleischman, A. J., & Roy, S. (2011). High Knudsen number fluid flow at near-standard temperature and pressure conditions using precision nanochannels. Microfluidics and Nanofluidics, 10(2), 425–433. https://doi.org/10.1007/s10404-010-0682-4
Fissell, W. H., A. T. Conlisk, S. Datta, J. M. Magistrelli, J. T. Glass, A. J. Fleischman, and S. Roy. “High Knudsen number fluid flow at near-standard temperature and pressure conditions using precision nanochannels.” Microfluidics and Nanofluidics 10, no. 2 (February 1, 2011): 425–33. https://doi.org/10.1007/s10404-010-0682-4.
Fissell WH, Conlisk AT, Datta S, Magistrelli JM, Glass JT, Fleischman AJ, et al. High Knudsen number fluid flow at near-standard temperature and pressure conditions using precision nanochannels. Microfluidics and Nanofluidics. 2011 Feb 1;10(2):425–33.
Fissell, W. H., et al. “High Knudsen number fluid flow at near-standard temperature and pressure conditions using precision nanochannels.” Microfluidics and Nanofluidics, vol. 10, no. 2, Feb. 2011, pp. 425–33. Scopus, doi:10.1007/s10404-010-0682-4.
Fissell WH, Conlisk AT, Datta S, Magistrelli JM, Glass JT, Fleischman AJ, Roy S. High Knudsen number fluid flow at near-standard temperature and pressure conditions using precision nanochannels. Microfluidics and Nanofluidics. 2011 Feb 1;10(2):425–433.
Journal cover image

Published In

Microfluidics and Nanofluidics

DOI

EISSN

1613-4990

ISSN

1613-4982

Publication Date

February 1, 2011

Volume

10

Issue

2

Start / End Page

425 / 433

Related Subject Headings

  • Nanoscience & Nanotechnology
  • 4018 Nanotechnology
  • 4012 Fluid mechanics and thermal engineering
  • 1007 Nanotechnology
  • 0915 Interdisciplinary Engineering
  • 0913 Mechanical Engineering