Epitaxial growth of β-SiC thin films on 6H α-SiC substrates via chemical vapor deposition
Publication
, Journal Article
Kong, HS; Glass, JT; Davis, RF
Published in: Applied Physics Letters
December 1, 1986
Epitaxial films of cubic β-SiC(111) have been grown via chemical vapor deposition at 1683 K on (0001) substrates of hexagonal 6H α-SiC. Optical microscopy of the surface indicated that a decrease in the ratio of the sum of the C and Si source gases to the H2 carrier gas changed the crystallization behavior from polycrystalline to monocrystalline. Cross-sectional transmission electron microscopy showed almost no line or planar defects at the substrate/film interface and very few defects within the bulk of the film.
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Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
December 1, 1986
Volume
49
Issue
17
Start / End Page
1074 / 1076
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences
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Kong, H. S., Glass, J. T., & Davis, R. F. (1986). Epitaxial growth of β-SiC thin films on 6H α-SiC substrates via chemical vapor deposition. Applied Physics Letters, 49(17), 1074–1076. https://doi.org/10.1063/1.97479
Kong, H. S., J. T. Glass, and R. F. Davis. “Epitaxial growth of β-SiC thin films on 6H α-SiC substrates via chemical vapor deposition.” Applied Physics Letters 49, no. 17 (December 1, 1986): 1074–76. https://doi.org/10.1063/1.97479.
Kong HS, Glass JT, Davis RF. Epitaxial growth of β-SiC thin films on 6H α-SiC substrates via chemical vapor deposition. Applied Physics Letters. 1986 Dec 1;49(17):1074–6.
Kong, H. S., et al. “Epitaxial growth of β-SiC thin films on 6H α-SiC substrates via chemical vapor deposition.” Applied Physics Letters, vol. 49, no. 17, Dec. 1986, pp. 1074–76. Scopus, doi:10.1063/1.97479.
Kong HS, Glass JT, Davis RF. Epitaxial growth of β-SiC thin films on 6H α-SiC substrates via chemical vapor deposition. Applied Physics Letters. 1986 Dec 1;49(17):1074–1076.
Published In
Applied Physics Letters
DOI
ISSN
0003-6951
Publication Date
December 1, 1986
Volume
49
Issue
17
Start / End Page
1074 / 1076
Related Subject Headings
- Applied Physics
- 51 Physical sciences
- 40 Engineering
- 10 Technology
- 09 Engineering
- 02 Physical Sciences