Fabrication and characterization of electrokinetic micro pumps
Publication
, Journal Article
Zeng, S; Chen, CH; Mikkelsen, JC; Santiago, JG
Published in: Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference
January 1, 2000
Electrokinetic (EK) micropumps have been fabricated and demonstrated in which electroosmotic flow is used to transport fluids. Deionized water and pure acetonitrile have been used as working fluids to achieve low current density pumping conditions. These EK pumps have no moving parts and can generate maximum pressures of more than 20 atm at 2 kV applied voltage. Minimizing and controlling electrolytic gas generation is a major concern. Gas generated at the downstream electrode surfaces appears to be forced to dissolve into surrounding fluid at high pressure (> 7 atm) condition, and this permits a stable pump operation. Measurements of flow rate have been used to estimate pump structure parameters.
Duke Scholars
Published In
Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference
Publication Date
January 1, 2000
Volume
2
Start / End Page
31 / 36
Citation
APA
Chicago
ICMJE
MLA
NLM
Zeng, S., Chen, C. H., Mikkelsen, J. C., & Santiago, J. G. (2000). Fabrication and characterization of electrokinetic micro pumps. Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference, 2, 31–36.
Zeng, S., C. H. Chen, J. C. Mikkelsen, and J. G. Santiago. “Fabrication and characterization of electrokinetic micro pumps.” Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference 2 (January 1, 2000): 31–36.
Zeng S, Chen CH, Mikkelsen JC, Santiago JG. Fabrication and characterization of electrokinetic micro pumps. Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference. 2000 Jan 1;2:31–6.
Zeng, S., et al. “Fabrication and characterization of electrokinetic micro pumps.” Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference, vol. 2, Jan. 2000, pp. 31–36.
Zeng S, Chen CH, Mikkelsen JC, Santiago JG. Fabrication and characterization of electrokinetic micro pumps. Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference. 2000 Jan 1;2:31–36.
Published In
Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference
Publication Date
January 1, 2000
Volume
2
Start / End Page
31 / 36